Monolithic GaAs PHEMT MMICs integrated with RF MEMS switches

J. B. Hacker, M. Kim, R. E. Mihailovich, J. F. DeNatale

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    16 Citations (Scopus)

    Abstract

    Low-loss RF MEMS switches have been integrated with HEMT MMIC circuits on GaAs substrates to allow the fabrication of a new class of high-performance microwave and millimeter-wave circuits. The integration process allows the co-integration of MEMS microrelays and GaAs PHEMT devices with no sacrifice in performance or yield to either device. Examples of circuits fabricated include multi-band low-noise amplifiers, transmit and receive (T/R) circuits, and a switched dual-width power amplifier at X-band. The power amplifier uses two MEMS switches at the input to guide the RF signal between two paths. Each path provides single-stage amplification using different size HEMT devices to optimize efficiency over a wide range of output power levels.

    Original languageEnglish
    Title of host publicationIEEE Compound Semiconductor Integrated Circuit Symposium; 2004 IEEE CSIC Symposium, 26th Anniversary
    Subtitle of host publicationCompounding Your Chips in Monterey - Technical Digest 2004
    Pages229-232
    Number of pages4
    DOIs
    Publication statusPublished - 2004
    EventIEEE Compound Semiconductor Integrated Circuit Symposium; 2004 IEEE CSIC Symposium - Monterey, CA, United States
    Duration: 2004 Oct 242004 Oct 27

    Publication series

    NameTechnical Digest - IEEE Compound Semiconductor Integrated Circuit Symposium, CSIC
    ISSN (Print)1550-8781

    Other

    OtherIEEE Compound Semiconductor Integrated Circuit Symposium; 2004 IEEE CSIC Symposium
    Country/TerritoryUnited States
    CityMonterey, CA
    Period04/10/2404/10/27

    Keywords

    • Amplifier
    • HEMT
    • MEMS switch
    • MMIC

    ASJC Scopus subject areas

    • General Engineering

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