MR head wafer fabrication technology: Current and future perspectives

Gunther Baubock, Huan Q. Dang, David C. Hinson, Laurence L. Rea, Young K. Kim

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


Areal storage densities and yield requirements continuously drive process optimizations in volume manufacturing of magnetoresistive (MR) heads. Several topics related to the manufacturability of MR heads are discussed. A dependable supply of MR sputter targets with low magnetostriction λs is critical. By using an internally developed technique, λs can be predicted to within ±1.0 x 10-7. MR film thickness uniformity can be improved by 60% by synchronizing the shutter activation with the substrate table. The profile of the photoresist for the read trackwidth definition is affected by initial exposure dose and post expose bake temperature. The use of mass-spectrometric and optical emission endpoint detection methods during ion beam etching of the MR layers allows a precise determination of the stopping point without overmilling into the layer underneath.

Original languageEnglish
Pages (from-to)25-30
Number of pages6
JournalIEEE Transactions on Magnetics
Issue number1
Publication statusPublished - 1996
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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