Multi-height micro structures in poly(dimethyl siloxane) lab-on-a-chip

S. Chung; J. Park; C. Chung; D. C. Han; J. K. Chang

doi:10.1007/s00542-003-0301-3

Multi-height micro structures in poly(dimethyl siloxane) lab-on-a-chip

S. Chung, J. Park, C. Chung, D. C. Han, J. K. Chang

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

The PDMS (poly(dimethyl siloxane)) replica molding is very useful for lab-on-a-chip development. This paper describes the several fabrication schemes of master fabrication for multi-height micro structures in PDMS microchip, and gives the overview over the technologies used for PDMS replica molding and channel closing with oxygen plasma treatment. Developed processes in the paper are good solution to fabricate the more complex structures in microfluidic lab-on-a-chip.

Original language	English
Pages (from-to)	81-88
Number of pages	8
Journal	Microsystem Technologies
Volume	10
Issue number	2
DOIs	https://doi.org/10.1007/s00542-003-0301-3
Publication status	Published - 2004 Jan

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Hardware and Architecture
Electrical and Electronic Engineering

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10.1007/s00542-003-0301-3

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abstract = "The PDMS (poly(dimethyl siloxane)) replica molding is very useful for lab-on-a-chip development. This paper describes the several fabrication schemes of master fabrication for multi-height micro structures in PDMS microchip, and gives the overview over the technologies used for PDMS replica molding and channel closing with oxygen plasma treatment. Developed processes in the paper are good solution to fabricate the more complex structures in microfluidic lab-on-a-chip.",

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AB - The PDMS (poly(dimethyl siloxane)) replica molding is very useful for lab-on-a-chip development. This paper describes the several fabrication schemes of master fabrication for multi-height micro structures in PDMS microchip, and gives the overview over the technologies used for PDMS replica molding and channel closing with oxygen plasma treatment. Developed processes in the paper are good solution to fabricate the more complex structures in microfluidic lab-on-a-chip.

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Multi-height micro structures in poly(dimethyl siloxane) lab-on-a-chip

Abstract

ASJC Scopus subject areas

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