The PDMS (poly(dimethyl siloxane)) replica molding is very useful for lab-on-a-chip development. This paper describes the several fabrication schemes of master fabrication for multi-height micro structures in PDMS microchip, and gives the overview over the technologies used for PDMS replica molding and channel closing with oxygen plasma treatment. Developed processes in the paper are good solution to fabricate the more complex structures in microfluidic lab-on-a-chip.
|Number of pages||8|
|Publication status||Published - 2004 Jan|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering