Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure

Woo Sung Cho; Seung Il Moon; Yang Doo Lee; Yun Hi Lee; Jung Ho Park; Byeong Kwon Ju

doi:10.1109/LED.2005.851095

Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure

Woo Sung Cho, Seung Il Moon, Yang Doo Lee, Yun Hi Lee, Jung Ho Park, Byeong Kwon Ju

Research output: Contribution to journal › Article › peer-review

54 Citations (Scopus)

Abstract

We address a multiwall carbon nanotube (MWCNT) gas sensor that has an enhanced reproducibility. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and an MWCNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature changes to modify the rates for desorption of gases on the sensing surface during sensor operation. Gas sensor responses of MWCNT-film to NO₂ at room temperature are reported. We show that the sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of 130 °C.

Original language	English
Pages (from-to)	498-500
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	26
Issue number	7
DOIs	https://doi.org/10.1109/LED.2005.851095
Publication status	Published - 2005 Jul

Bibliographical note

Funding Information:
Manuscript received February 25, 2005; revised April 21, 2005. This work was supported in part by the Nano Core Technology Project of the MOST (III), Korea and in part by the KRF Project under Grant 2004-05-C00060. The review of this letter was arranged by Editor K. T. Kornegay. W.-S. Cho and S.-I. Moon are with the Opto-Electronic Materials Research Center and the Department of Electronic Engineering, Korea Institute of Science and Technology, Seoul 136-791, Korea. Y.-D. Lee is with the Opto-Electronic Materials Research Center, Korea Institute of Science and Technology, Korea University, Seoul 136-791, Korea. J.-H. Park and B. K. Ju are with the Department of Electronic Engineering, Korea University, Seoul 136-701, Korea (e-mail: [email protected]). Y.-H. Lee is with the Department of Physics, Korea University, Seoul 136-701, Korea. Digital Object Identifier 10.1109/LED.2005.851095 Fig. 1. Top: Schematic of the sensor. Bottom: FE-SEM micrograph of a sensor (left) and an MWCNT-film pattern (right).

Keywords

Gas sensor
Multiwall carbon nanotube (MWCNT)
Nitrogen dioxide (NO)
Recovery

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/LED.2005.851095

Cite this

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title = "Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure",

abstract = "We address a multiwall carbon nanotube (MWCNT) gas sensor that has an enhanced reproducibility. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and an MWCNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature changes to modify the rates for desorption of gases on the sensing surface during sensor operation. Gas sensor responses of MWCNT-film to NO2 at room temperature are reported. We show that the sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of 130 °C.",

keywords = "Gas sensor, Multiwall carbon nanotube (MWCNT), Nitrogen dioxide (NO), Recovery",

author = "Cho, {Woo Sung} and Moon, {Seung Il} and Lee, {Yang Doo} and Lee, {Yun Hi} and Park, {Jung Ho} and Ju, {Byeong Kwon}",

note = "Funding Information: Manuscript received February 25, 2005; revised April 21, 2005. This work was supported in part by the Nano Core Technology Project of the MOST (III), Korea and in part by the KRF Project under Grant 2004-05-C00060. The review of this letter was arranged by Editor K. T. Kornegay. W.-S. Cho and S.-I. Moon are with the Opto-Electronic Materials Research Center and the Department of Electronic Engineering, Korea Institute of Science and Technology, Seoul 136-791, Korea. Y.-D. Lee is with the Opto-Electronic Materials Research Center, Korea Institute of Science and Technology, Korea University, Seoul 136-791, Korea. J.-H. Park and B. K. Ju are with the Department of Electronic Engineering, Korea University, Seoul 136-701, Korea (e-mail: [email protected]). Y.-H. Lee is with the Department of Physics, Korea University, Seoul 136-701, Korea. Digital Object Identifier 10.1109/LED.2005.851095 Fig. 1. Top: Schematic of the sensor. Bottom: FE-SEM micrograph of a sensor (left) and an MWCNT-film pattern (right).",

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AU - Ju, Byeong Kwon

N1 - Funding Information: Manuscript received February 25, 2005; revised April 21, 2005. This work was supported in part by the Nano Core Technology Project of the MOST (III), Korea and in part by the KRF Project under Grant 2004-05-C00060. The review of this letter was arranged by Editor K. T. Kornegay. W.-S. Cho and S.-I. Moon are with the Opto-Electronic Materials Research Center and the Department of Electronic Engineering, Korea Institute of Science and Technology, Seoul 136-791, Korea. Y.-D. Lee is with the Opto-Electronic Materials Research Center, Korea Institute of Science and Technology, Korea University, Seoul 136-791, Korea. J.-H. Park and B. K. Ju are with the Department of Electronic Engineering, Korea University, Seoul 136-701, Korea (e-mail: [email protected]). Y.-H. Lee is with the Department of Physics, Korea University, Seoul 136-701, Korea. Digital Object Identifier 10.1109/LED.2005.851095 Fig. 1. Top: Schematic of the sensor. Bottom: FE-SEM micrograph of a sensor (left) and an MWCNT-film pattern (right).

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N2 - We address a multiwall carbon nanotube (MWCNT) gas sensor that has an enhanced reproducibility. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and an MWCNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature changes to modify the rates for desorption of gases on the sensing surface during sensor operation. Gas sensor responses of MWCNT-film to NO2 at room temperature are reported. We show that the sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of 130 °C.

AB - We address a multiwall carbon nanotube (MWCNT) gas sensor that has an enhanced reproducibility. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and an MWCNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature changes to modify the rates for desorption of gases on the sensing surface during sensor operation. Gas sensor responses of MWCNT-film to NO2 at room temperature are reported. We show that the sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of 130 °C.

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Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure

Abstract

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Keywords

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