Nanomaterial-embedded gas sensor fabrication

Joondong Kim, Ju Hyung Yun, Chang Soo Han

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


Nanomaterial-embedded gas sensors were fabricated on a 4-in. Si wafer counting 200 units. Carbon nanotubes (CNTs) and tin oxide (SnO) nanoparticles were prepared as hosts to detect NO2 gas molecules at room temperature. Ink-jet approach was applied to deposit nanomaterials on a Si wafer. Metal deposition above the nanomaterials formed the metal-sitting structure providing spontaneous passivation. The performance of the CNT sensor and SnO sensor showed distinctive responses to NO2 gas depending on the type of semiconductor. The sensor is highly sensitive, to detect a 10 ppb level of NO2. It offers massive production of nanomaterial gas sensor units, and the performance is discussed.

Original languageEnglish
Pages (from-to)e38-e41
JournalCurrent Applied Physics
Issue number2 SUPPL.
Publication statusPublished - 2009 Mar
Externally publishedYes

Bibliographical note

Funding Information:
The authors acknowledge financial support from Daedeok Innopolis and Center for Nanoscale Mechatronics and Manufacturing through the 21C Frontier Research Program funded by the Ministry of Education, Science and Technology (MEST) in Korea.


  • Gas sensors
  • Highly sensitive
  • Massive production
  • Nanomaterial

ASJC Scopus subject areas

  • General Materials Science
  • General Physics and Astronomy


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