Nanometer-scale lithography on H-passivated Si(100) by atomic force microscope in air

Hai Tal Lee, Jae Seuk Oh, Seong Ju Park, Kang Ho Park, Jeong Sook Ha, Hyung Joun Yoo, Ja Yong Koo

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37 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds