Near infrared ray annealing effects on the properties of Al-doped ZnO thin films prepared by spin-coating method

Min Chul Jun; Sang Uk Park; Moon Soon Chae; Dong Jin Shin; Jae Geun Ha; Sang Mo Koo; Kyung Ju Lee; Byung Moo Moon; Chi Young Song; Jung Hyuk Koh

doi:10.1166/jnn.2013.7724

Near infrared ray annealing effects on the properties of Al-doped ZnO thin films prepared by spin-coating method

Min Chul Jun, Sang Uk Park, Moon Soon Chae, Dong Jin Shin, Jae Geun Ha, Sang Mo Koo, Kyung Ju Lee, Byung Moo Moon, Chi Young Song, Jung Hyuk Koh

GREEN SCHOOL (Graduate School of Energy and Environment)

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

In this research, we will present Al doped ZnO thin films for transparent conducting oxide applications. Aluminum doped zinc oxide (AZO) thin films have been deposited on the glass substrates by sol-gel spin-coating method using zinc acetate dehydrate (Zn(CH₃COO)2 · 2H₂O) and aluminum chloride hexahydrate (AlCl₃ · 6H₂O) as cation sources. In this study, we investigated the effects of near infrared ray (NIR) annealing on the structural, optical and electrical characteristics of the AZO thin films. The experimental results showed that AZO thin films have a hexagonal wurtzite crystal structure and had a good transmittance higher than 85% within the visible wavelength region. It was also found that the additional energy of NIR helps to improve the electrical properties of Al doped ZnO transparent conducting oxides.

Original language	English
Pages (from-to)	6312-6315
Number of pages	4
Journal	Journal of Nanoscience and Nanotechnology
Volume	13
Issue number	9
DOIs	https://doi.org/10.1166/jnn.2013.7724
Publication status	Published - 2013 Sept

Keywords

Al-doped ZnO
NIR
Spin-coating
Thin films
Transparent conducting oxide

ASJC Scopus subject areas

Bioengineering
General Chemistry
Biomedical Engineering
General Materials Science
Condensed Matter Physics

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title = "Near infrared ray annealing effects on the properties of Al-doped ZnO thin films prepared by spin-coating method",

abstract = "In this research, we will present Al doped ZnO thin films for transparent conducting oxide applications. Aluminum doped zinc oxide (AZO) thin films have been deposited on the glass substrates by sol-gel spin-coating method using zinc acetate dehydrate (Zn(CH3COO)2 · 2H2O) and aluminum chloride hexahydrate (AlCl3 · 6H2O) as cation sources. In this study, we investigated the effects of near infrared ray (NIR) annealing on the structural, optical and electrical characteristics of the AZO thin films. The experimental results showed that AZO thin films have a hexagonal wurtzite crystal structure and had a good transmittance higher than 85% within the visible wavelength region. It was also found that the additional energy of NIR helps to improve the electrical properties of Al doped ZnO transparent conducting oxides.",

keywords = "Al-doped ZnO, NIR, Spin-coating, Thin films, Transparent conducting oxide",

author = "Jun, {Min Chul} and Park, {Sang Uk} and Chae, {Moon Soon} and Shin, {Dong Jin} and Ha, {Jae Geun} and Koo, {Sang Mo} and Lee, {Kyung Ju} and Moon, {Byung Moo} and Song, {Chi Young} and Koh, {Jung Hyuk}",

year = "2013",

month = sep,

doi = "10.1166/jnn.2013.7724",

language = "English",

volume = "13",

pages = "6312--6315",

journal = "Journal of Nanoscience and Nanotechnology",

issn = "1533-4880",

publisher = "American Scientific Publishers",

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TY - JOUR

T1 - Near infrared ray annealing effects on the properties of Al-doped ZnO thin films prepared by spin-coating method

AU - Jun, Min Chul

AU - Park, Sang Uk

AU - Chae, Moon Soon

AU - Shin, Dong Jin

AU - Ha, Jae Geun

AU - Koo, Sang Mo

AU - Lee, Kyung Ju

AU - Moon, Byung Moo

AU - Song, Chi Young

AU - Koh, Jung Hyuk

PY - 2013/9

Y1 - 2013/9

N2 - In this research, we will present Al doped ZnO thin films for transparent conducting oxide applications. Aluminum doped zinc oxide (AZO) thin films have been deposited on the glass substrates by sol-gel spin-coating method using zinc acetate dehydrate (Zn(CH3COO)2 · 2H2O) and aluminum chloride hexahydrate (AlCl3 · 6H2O) as cation sources. In this study, we investigated the effects of near infrared ray (NIR) annealing on the structural, optical and electrical characteristics of the AZO thin films. The experimental results showed that AZO thin films have a hexagonal wurtzite crystal structure and had a good transmittance higher than 85% within the visible wavelength region. It was also found that the additional energy of NIR helps to improve the electrical properties of Al doped ZnO transparent conducting oxides.

AB - In this research, we will present Al doped ZnO thin films for transparent conducting oxide applications. Aluminum doped zinc oxide (AZO) thin films have been deposited on the glass substrates by sol-gel spin-coating method using zinc acetate dehydrate (Zn(CH3COO)2 · 2H2O) and aluminum chloride hexahydrate (AlCl3 · 6H2O) as cation sources. In this study, we investigated the effects of near infrared ray (NIR) annealing on the structural, optical and electrical characteristics of the AZO thin films. The experimental results showed that AZO thin films have a hexagonal wurtzite crystal structure and had a good transmittance higher than 85% within the visible wavelength region. It was also found that the additional energy of NIR helps to improve the electrical properties of Al doped ZnO transparent conducting oxides.

KW - Al-doped ZnO

KW - NIR

KW - Spin-coating

KW - Thin films

KW - Transparent conducting oxide

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JO - Journal of Nanoscience and Nanotechnology

JF - Journal of Nanoscience and Nanotechnology

IS - 9

ER -

Near infrared ray annealing effects on the properties of Al-doped ZnO thin films prepared by spin-coating method

Abstract

Keywords

ASJC Scopus subject areas

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