Ni implantation-induced enhancement of the crystallisation of amorphous Si

Young Woo Ok; Tae Yeon Seong; Chel Jong Choi; K. N. Tu

doi:10.1007/s10854-006-9035-1

Ni implantation-induced enhancement of the crystallisation of amorphous Si

Young Woo Ok, Tae Yeon Seong, Chel Jong Choi, K. N. Tu

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We report on the effect of Ni implantation on the crystallisation process of amorphous Si formed by ion implantation during excimer laser annealing. Scanning transmission electron microscopy and X-ray photoemission spectroscopy results show that NiSi₂ precipitates are formed in the Si-Ni-implanted samples. It is shown that the Ni implantation results in the enhanced crystallisation of amorphous Si during laser annealing. The Si-Ni-implanted samples become epitaxial to the Si substrate at 600 mJ/cm², while the Si-implanted samples produce epitaxial relationship at 800 mJ/cm². Possible mechanisms by which implanted Ni atoms play a role are given to describe the enhanced crystallisation process of amorphous Si.

Original language	English
Pages (from-to)	979-985
Number of pages	7
Journal	Journal of Materials Science: Materials in Electronics
Volume	17
Issue number	12
DOIs	https://doi.org/10.1007/s10854-006-9035-1
Publication status	Published - 2006 Dec

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1007/s10854-006-9035-1

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title = "Ni implantation-induced enhancement of the crystallisation of amorphous Si",

abstract = "We report on the effect of Ni implantation on the crystallisation process of amorphous Si formed by ion implantation during excimer laser annealing. Scanning transmission electron microscopy and X-ray photoemission spectroscopy results show that NiSi2 precipitates are formed in the Si-Ni-implanted samples. It is shown that the Ni implantation results in the enhanced crystallisation of amorphous Si during laser annealing. The Si-Ni-implanted samples become epitaxial to the Si substrate at 600 mJ/cm2, while the Si-implanted samples produce epitaxial relationship at 800 mJ/cm2. Possible mechanisms by which implanted Ni atoms play a role are given to describe the enhanced crystallisation process of amorphous Si.",

author = "Ok, {Young Woo} and Seong, {Tae Yeon} and Choi, {Chel Jong} and Tu, {K. N.}",

year = "2006",

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doi = "10.1007/s10854-006-9035-1",

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T1 - Ni implantation-induced enhancement of the crystallisation of amorphous Si

AU - Ok, Young Woo

AU - Seong, Tae Yeon

AU - Choi, Chel Jong

AU - Tu, K. N.

PY - 2006/12

Y1 - 2006/12

N2 - We report on the effect of Ni implantation on the crystallisation process of amorphous Si formed by ion implantation during excimer laser annealing. Scanning transmission electron microscopy and X-ray photoemission spectroscopy results show that NiSi2 precipitates are formed in the Si-Ni-implanted samples. It is shown that the Ni implantation results in the enhanced crystallisation of amorphous Si during laser annealing. The Si-Ni-implanted samples become epitaxial to the Si substrate at 600 mJ/cm2, while the Si-implanted samples produce epitaxial relationship at 800 mJ/cm2. Possible mechanisms by which implanted Ni atoms play a role are given to describe the enhanced crystallisation process of amorphous Si.

AB - We report on the effect of Ni implantation on the crystallisation process of amorphous Si formed by ion implantation during excimer laser annealing. Scanning transmission electron microscopy and X-ray photoemission spectroscopy results show that NiSi2 precipitates are formed in the Si-Ni-implanted samples. It is shown that the Ni implantation results in the enhanced crystallisation of amorphous Si during laser annealing. The Si-Ni-implanted samples become epitaxial to the Si substrate at 600 mJ/cm2, while the Si-implanted samples produce epitaxial relationship at 800 mJ/cm2. Possible mechanisms by which implanted Ni atoms play a role are given to describe the enhanced crystallisation process of amorphous Si.

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JO - Journal of Materials Science: Materials in Electronics

JF - Journal of Materials Science: Materials in Electronics

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Ni implantation-induced enhancement of the crystallisation of amorphous Si

Abstract

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