A new, simple fabrication method of circularly and axially nonsymmetrical MCVD layers has been proposed. Thermophoretic mechanism was regulated by means of two linear heaters and coolers, respectively, which change the circular symmetry of thermophoretic deposition mechanism of standard MCVD process. Furthermore, a theoretical description of thermophoretic deposition mechanism inside the substrate tube in some simplified conditions is given.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics