Nonvolatile memory devices prepared from sol-gel derived niobium pentoxide films

Hyunhee Baek, Chanwoo Lee, Jungkyu Choi, Jinhan Cho

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)


We report on the resistive switching nonvolatile memory (RSNM) properties of niobium pentoxide (Nb2O5) films prepared using sol-gel chemistry. A sol-gel derived solution of niobium ethoxide, a precursor to Nb2O5, was spin-coated on to a platinum (Pt)-coated silicon substrate, and was then annealed at approximately 620 and 450 C to form a Nb2O5 film of polycrystalline and amorphous structure, respectively. A top electrode consisting of Ag, W, Au, or Pt was then coated onto the Nb2O5 films to complete the fabrication. After a forming process of limited current compliance up to 10 mA, known as "electroforming", a resistive switching phenomenon, independent of voltage polarity (unipolar switching), was observed at low operating voltages (0.59 ± 0.05 VRESET and 1.03 ± 0.06 VSET) with a high ON/OFF current ratio above 108. The reported approach offers opportunities for preparing Nb2O5-based resistive switching memory devices from solution process.

Original languageEnglish
Pages (from-to)380-386
Number of pages7
Issue number1
Publication statusPublished - 2013 Jan 8

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Spectroscopy
  • Electrochemistry


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