Novel fabrication technique for nanoscale hydrogen silsesquioxane structures using a direct printing technique

Ki Yeon Yang; Sang Chul Oh; Hyungwon Park; Heon Lee

doi:10.1116/1.3628585

Novel fabrication technique for nanoscale hydrogen silsesquioxane structures using a direct printing technique

Ki Yeon Yang
, Sang Chul Oh
, Hyungwon Park
, Heon Lee^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

Hydrogen silsesquioxane (HSQ), a type of spin-on glass, is an attractive material for nanobio, semiconductor and photoelectronic applications because it can be transformed into SiO₂ by a simple annealing process. Studies on the fabrication of nanosized structures are necessary for the simple and easy production of HSQ nanostructures because of their unique characteristics. In this study, a fabrication method was developed for HSQ nanostructures as small as 50 nm using a direct printing technique with a poly (dimethylsiloxane) (PDMS) mold. Using this technique, HSQ nanostructures can be fabricated on a curved substrate

Original language	English
Article number	051602
Journal	Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume	29
Issue number	5
DOIs	https://doi.org/10.1116/1.3628585
Publication status	Published - 2011 Sept

Bibliographical note

Funding Information:
This work was supported by the Nano R&D program through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science and Technology (2010-0019152) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology.

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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Cite this

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title = "Novel fabrication technique for nanoscale hydrogen silsesquioxane structures using a direct printing technique",

abstract = "Hydrogen silsesquioxane (HSQ), a type of spin-on glass, is an attractive material for nanobio, semiconductor and photoelectronic applications because it can be transformed into SiO2 by a simple annealing process. Studies on the fabrication of nanosized structures are necessary for the simple and easy production of HSQ nanostructures because of their unique characteristics. In this study, a fabrication method was developed for HSQ nanostructures as small as 50 nm using a direct printing technique with a poly (dimethylsiloxane) (PDMS) mold. Using this technique, HSQ nanostructures can be fabricated on a curved substrate",

author = "Yang, \{Ki Yeon\} and Oh, \{Sang Chul\} and Hyungwon Park and Heon Lee",

note = "Funding Information: This work was supported by the Nano R\&D program through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science and Technology (2010-0019152) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology.",

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AU - Yang, Ki Yeon

AU - Oh, Sang Chul

AU - Park, Hyungwon

AU - Lee, Heon

N1 - Funding Information: This work was supported by the Nano R&D program through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science and Technology (2010-0019152) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology.

PY - 2011/9

Y1 - 2011/9

N2 - Hydrogen silsesquioxane (HSQ), a type of spin-on glass, is an attractive material for nanobio, semiconductor and photoelectronic applications because it can be transformed into SiO2 by a simple annealing process. Studies on the fabrication of nanosized structures are necessary for the simple and easy production of HSQ nanostructures because of their unique characteristics. In this study, a fabrication method was developed for HSQ nanostructures as small as 50 nm using a direct printing technique with a poly (dimethylsiloxane) (PDMS) mold. Using this technique, HSQ nanostructures can be fabricated on a curved substrate

AB - Hydrogen silsesquioxane (HSQ), a type of spin-on glass, is an attractive material for nanobio, semiconductor and photoelectronic applications because it can be transformed into SiO2 by a simple annealing process. Studies on the fabrication of nanosized structures are necessary for the simple and easy production of HSQ nanostructures because of their unique characteristics. In this study, a fabrication method was developed for HSQ nanostructures as small as 50 nm using a direct printing technique with a poly (dimethylsiloxane) (PDMS) mold. Using this technique, HSQ nanostructures can be fabricated on a curved substrate

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IS - 5

M1 - 051602

ER -

Novel fabrication technique for nanoscale hydrogen silsesquioxane structures using a direct printing technique

Abstract

Bibliographical note

ASJC Scopus subject areas

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