Novel nanoscale thermal property imaging technique: The 2ω method. I. Principle and the 2ω signal measurement

Hee Hwan Roh, Joon Sik Lee, Dong Lib Kim, Jisang Park, Kyeongtae Kim, Ohmyoung Kwon, Seung Ho Park, Young Ki Choi, Arun Majumdar

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)


In this and the following companion articles, the authors present the 2ω method, a novel ac mode local thermal property imaging technique with nanoscale spatial resolution. To demonstrate the use of the thermoelectric probe as an active one that can function as both a heater and a temperature sensor, the authors develop and implement the 2ω signal measurement technique, which can extract thermoelectric signals from a thermocouple junction while electrically heating it simultaneously. The principle of the 2ω signal measurement technique is explained by a steady periodic electrothermal analysis. The authors use a specially designed test pattern to experimentally verify that the 2ω signal is caused by the temperature oscillation induced by Joule heating. In addition, based on the results from an experiment using a cross-shaped pattern, the measurement accuracy of the 2ω method depends on the junction size of the thermoelectric probe. The 2ω method is implemented and compared with other methods in the following companion paper.

Original languageEnglish
Pages (from-to)2398-2404
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number5
Publication statusPublished - 2006

Bibliographical note

Funding Information:
The authors gratefully acknowledge financial support from the Micro Thermal System Research Center sponsored by the Korean Science and Engineering Foundation. Four of the authors (D. L. K., J. P., K. K., and O. K.) also gratefully acknowledge financial support from the Korea Research Foundation Grant (KRF-2004-205-D00032).

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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