Novel nanoscale thermal property imaging technique: The 2ω method. II. Demonstration and comparison

Hee Hwan Roh; Joon Sik Lee; Dong Lib Kim; Jisang Park; Kyeongtae Kim; Ohmyoung Kwon; Seung Ho Park; Young Ki Choi; Arun Majumdar

doi:10.1116/1.2353843

Novel nanoscale thermal property imaging technique: The 2ω method. II. Demonstration and comparison

Hee Hwan Roh, Joon Sik Lee, Dong Lib Kim, Jisang Park, Kyeongtae Kim, Ohmyoung Kwon, Seung Ho Park, Young Ki Choi, Arun Majumdar

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

This paper presents the 2ω method, a newly developed ac mode local thermal property imaging technique with nanoscale spatial resolution. The authors batch-fabricate the thermoelectric probe, whose junction size is about 200 nm, with yield higher than 95%. The shortest time constant of the thermoelectric probe is measured to be 0.72 ms. They experimentally demonstrate that the 2ω method can map out the local thermal property of a sample by monitoring the amplitude of the 2ω signal from the thermocouple junction of a probe heated by an ac. By comparing with the thermal property images obtained by other methods, they also show that the 2ω method using the point-heating and point-sensing scheme is the most suitable for the nanoscale thermal property imaging.

Original language	English
Pages (from-to)	2405-2411
Number of pages	7
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	24
Issue number	5
DOIs	https://doi.org/10.1116/1.2353843
Publication status	Published - 2006

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1116/1.2353843

Cite this

@article{8e74bb4264e0421b89720417a0023065,

title = "Novel nanoscale thermal property imaging technique: The 2ω method. II. Demonstration and comparison",

abstract = "This paper presents the 2ω method, a newly developed ac mode local thermal property imaging technique with nanoscale spatial resolution. The authors batch-fabricate the thermoelectric probe, whose junction size is about 200 nm, with yield higher than 95%. The shortest time constant of the thermoelectric probe is measured to be 0.72 ms. They experimentally demonstrate that the 2ω method can map out the local thermal property of a sample by monitoring the amplitude of the 2ω signal from the thermocouple junction of a probe heated by an ac. By comparing with the thermal property images obtained by other methods, they also show that the 2ω method using the point-heating and point-sensing scheme is the most suitable for the nanoscale thermal property imaging.",

author = "Roh, {Hee Hwan} and Lee, {Joon Sik} and Kim, {Dong Lib} and Jisang Park and Kyeongtae Kim and Ohmyoung Kwon and Park, {Seung Ho} and Choi, {Young Ki} and Arun Majumdar",

note = "Funding Information: The authors gratefully acknowledge financial support from the Micro Thermal System Research Center sponsored by the Korean Science and Engineering Foundation. Four of the authors (D.L.K., J.P., K.K., and O.K.) also gratefully acknowledge financial support from the Korea Research Foundation Grant (KRF-2004-R08-2004-000-10619-0). Copyright: Copyright 2011 Elsevier B.V., All rights reserved.",

year = "2006",

doi = "10.1116/1.2353843",

language = "English",

volume = "24",

pages = "2405--2411",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "5",

}

TY - JOUR

T1 - Novel nanoscale thermal property imaging technique

T2 - The 2ω method. II. Demonstration and comparison

AU - Roh, Hee Hwan

AU - Lee, Joon Sik

AU - Kim, Dong Lib

AU - Park, Jisang

AU - Kim, Kyeongtae

AU - Kwon, Ohmyoung

AU - Park, Seung Ho

AU - Choi, Young Ki

AU - Majumdar, Arun

N1 - Funding Information: The authors gratefully acknowledge financial support from the Micro Thermal System Research Center sponsored by the Korean Science and Engineering Foundation. Four of the authors (D.L.K., J.P., K.K., and O.K.) also gratefully acknowledge financial support from the Korea Research Foundation Grant (KRF-2004-R08-2004-000-10619-0). Copyright: Copyright 2011 Elsevier B.V., All rights reserved.

PY - 2006

Y1 - 2006

N2 - This paper presents the 2ω method, a newly developed ac mode local thermal property imaging technique with nanoscale spatial resolution. The authors batch-fabricate the thermoelectric probe, whose junction size is about 200 nm, with yield higher than 95%. The shortest time constant of the thermoelectric probe is measured to be 0.72 ms. They experimentally demonstrate that the 2ω method can map out the local thermal property of a sample by monitoring the amplitude of the 2ω signal from the thermocouple junction of a probe heated by an ac. By comparing with the thermal property images obtained by other methods, they also show that the 2ω method using the point-heating and point-sensing scheme is the most suitable for the nanoscale thermal property imaging.

AB - This paper presents the 2ω method, a newly developed ac mode local thermal property imaging technique with nanoscale spatial resolution. The authors batch-fabricate the thermoelectric probe, whose junction size is about 200 nm, with yield higher than 95%. The shortest time constant of the thermoelectric probe is measured to be 0.72 ms. They experimentally demonstrate that the 2ω method can map out the local thermal property of a sample by monitoring the amplitude of the 2ω signal from the thermocouple junction of a probe heated by an ac. By comparing with the thermal property images obtained by other methods, they also show that the 2ω method using the point-heating and point-sensing scheme is the most suitable for the nanoscale thermal property imaging.

UR - http://www.scopus.com/inward/record.url?scp=33749356530&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33749356530&partnerID=8YFLogxK

U2 - 10.1116/1.2353843

DO - 10.1116/1.2353843

M3 - Article

AN - SCOPUS:33749356530

SN - 1071-1023

VL - 24

SP - 2405

EP - 2411

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 5

ER -

Novel nanoscale thermal property imaging technique: The 2ω method. II. Demonstration and comparison

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this