One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region

Joohoon Kim, Wonjoong Kim, Dong Kyo Oh, Hyunjung Kang, Hongyoon Kim, Trevon Badloe, Seokwoo Kim, Chanwoong Park, Hojung Choi, Heon Lee, Junsuk Rho

Research output: Contribution to journalArticlepeer-review

46 Citations (Scopus)

Abstract

A single-step printable platform for ultraviolet (UV) metasurfaces is introduced to overcome both the scarcity of low-loss UV materials and manufacturing limitations of high cost and low throughput. By dispersing zirconium dioxide (ZrO2) nanoparticles in a UV-curable resin, ZrO2 nanoparticle-embedded-resin (nano-PER) is developed as a printable material which has a high refractive index and low extinction coefficient from near-UV to deep-UV. In ZrO2 nano-PER, the UV-curable resin enables direct pattern transfer and ZrO2 nanoparticles increase the refractive index of the composite while maintaining a large bandgap. With this concept, UV metasurfaces can be fabricated in a single step by nanoimprint lithography. As a proof of concept, UV metaholograms operating in near-UV and deep-UV are experimentally demonstrated with vivid and clear holographic images. The proposed method enables repeat and rapid manufacturing of UV metasurfaces, and thus will bring UV metasurfaces more close to real life.

Original languageEnglish
Article number68
JournalLight: Science and Applications
Volume12
Issue number1
DOIs
Publication statusPublished - 2023 Dec

Bibliographical note

Funding Information:
This work was financially supported by the POSCO-POSTECH-RIST Convergence Research Center program funded by POSCO, a university R&D program funded by Samsung Electronics, and the National Research Foundation (NRF) grants (NRF-2022M3C1A3081312, NRF-2022M3H4A1A02074314, NRF-2021K1A3A1A17086079, NRF-2021K2A9A2A15000174, CAMM-2019M3A6B3030637, NRF-2019R1A5A8080290) funded by the Ministry of Science and ICT (MSIT) of the Korean government. J.K. and H.Y.K. acknowledge the POSTECH Alchemist fellowships. D.K. acknowledge the Hyundai Motor Chung Mong-Koo fellowship. H.J.K. acknowledges the POSTECHIAN fellowship. H.L. acknowledges the NRF grants (NRF-2022M3H4A1A02085335, NRF-2019K1A4A7A02113032, NRF-2018M3D1A1058997) funded by the MSIT of the Korean government, and the Technology Innovation program (20016234) funded by the Ministry of Trade, Industry & Energy of the Korean government.

Funding Information:
This work was financially supported by the POSCO-POSTECH-RIST Convergence Research Center program funded by POSCO, a university R&D program funded by Samsung Electronics, and the National Research Foundation (NRF) grants (NRF-2022M3C1A3081312, NRF-2022M3H4A1A02074314, NRF-2021K1A3A1A17086079, NRF-2021K2A9A2A15000174, CAMM-2019M3A6B3030637, NRF-2019R1A5A8080290) funded by the Ministry of Science and ICT (MSIT) of the Korean government. J.K. and H.Y.K. acknowledge the POSTECH Alchemist fellowships. D.K. acknowledge the Hyundai Motor Chung Mong-Koo fellowship. H.J.K. acknowledges the POSTECHIAN fellowship. H.L. acknowledges the NRF grants (NRF-2022M3H4A1A02085335, NRF-2019K1A4A7A02113032, NRF-2018M3D1A1058997) funded by the MSIT of the Korean government, and the Technology Innovation program (20016234) funded by the Ministry of Trade, Industry & Energy of the Korean government.

Publisher Copyright:
© 2023, The Author(s).

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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