Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition

Y. Zhong; Y. C. Shin; C. M. Kim; B. G. Lee; E. H. Kim; Y. J. Park; K. M.A. Sobahan; C. K. Hwangbo; Y. P. Lee; T. G. Kim

doi:10.1557/jmr.2008.0312

Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M.A. Sobahan, C. K. Hwangbo, Y. P. Lee, T. G. Kim

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

56 Citations (Scopus)

Abstract

The optical and electrical properties of "tilted" and "spiral" indium tin oxide (ITO) thin films are reported. The influence of the flux incident angle on the optical and electrical properties is investigated. When the flux incident angle is increased, both the refractive index and extinction coefficient of the film are decreased, but the resistivity is increased. Thus, the physical properties of the film can be modified over a wide range by adjusting the flux incident angle and substrate rotation scheme. It is suggested that the oblique angle deposition technique provides ITO films with more application possibilities by allowing their optical and electrical properties to be tailored.

Original language	English
Pages (from-to)	2500-2505
Number of pages	6
Journal	Journal of Materials Research
Volume	23
Issue number	9
DOIs	https://doi.org/10.1557/jmr.2008.0312
Publication status	Published - 2008 Sept

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition",

abstract = "The optical and electrical properties of {"}tilted{"} and {"}spiral{"} indium tin oxide (ITO) thin films are reported. The influence of the flux incident angle on the optical and electrical properties is investigated. When the flux incident angle is increased, both the refractive index and extinction coefficient of the film are decreased, but the resistivity is increased. Thus, the physical properties of the film can be modified over a wide range by adjusting the flux incident angle and substrate rotation scheme. It is suggested that the oblique angle deposition technique provides ITO films with more application possibilities by allowing their optical and electrical properties to be tailored.",

author = "Y. Zhong and Shin, {Y. C.} and Kim, {C. M.} and Lee, {B. G.} and Kim, {E. H.} and Park, {Y. J.} and Sobahan, {K. M.A.} and Hwangbo, {C. K.} and Lee, {Y. P.} and Kim, {T. G.}",

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T1 - Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition

AU - Zhong, Y.

AU - Shin, Y. C.

AU - Kim, C. M.

AU - Lee, B. G.

AU - Kim, E. H.

AU - Park, Y. J.

AU - Sobahan, K. M.A.

AU - Hwangbo, C. K.

AU - Lee, Y. P.

AU - Kim, T. G.

PY - 2008/9

Y1 - 2008/9

N2 - The optical and electrical properties of "tilted" and "spiral" indium tin oxide (ITO) thin films are reported. The influence of the flux incident angle on the optical and electrical properties is investigated. When the flux incident angle is increased, both the refractive index and extinction coefficient of the film are decreased, but the resistivity is increased. Thus, the physical properties of the film can be modified over a wide range by adjusting the flux incident angle and substrate rotation scheme. It is suggested that the oblique angle deposition technique provides ITO films with more application possibilities by allowing their optical and electrical properties to be tailored.

AB - The optical and electrical properties of "tilted" and "spiral" indium tin oxide (ITO) thin films are reported. The influence of the flux incident angle on the optical and electrical properties is investigated. When the flux incident angle is increased, both the refractive index and extinction coefficient of the film are decreased, but the resistivity is increased. Thus, the physical properties of the film can be modified over a wide range by adjusting the flux incident angle and substrate rotation scheme. It is suggested that the oblique angle deposition technique provides ITO films with more application possibilities by allowing their optical and electrical properties to be tailored.

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JO - Journal of Materials Research

JF - Journal of Materials Research

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Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition

Abstract

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