A spectroscopic ellipsometry (SE) study was performed on BaSm 2Ti4O12 (BSmT) thin films grown on TiN/SiO 2/c-Si substrate grown by RF-magnetron sputtering. After deposition, the film was annealed at 400 °C under four different conditions of oxygen pressure. For the analysis of the measured spectra, a four-layer model containing a BSmT film was applied, where the optical property of the BSmT layer was represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed that the refractive index and the extinction coefficient of the BSmT films changed consistently with oxygen pressure during the annealing procedure.
|Number of pages||5|
|Journal||Journal of the Korean Physical Society|
|Publication status||Published - 2008 Sept|
- Dielectric function
- Magnetron sputtering
ASJC Scopus subject areas
- Physics and Astronomy(all)