Optical properties of BaSm2Ti4O12 thin films studied by using spectroscopic ellipsometry

J. J. Yoon; Y. W. Jung; S. Y. Hwang; Y. D. Kim; S. Nahm; Y. H. Jeong

doi:10.3938/jkps.53.1352

Optical properties of BaSm₂Ti₄O₁₂ thin films studied by using spectroscopic ellipsometry

J. J. Yoon, Y. W. Jung, S. Y. Hwang, Y. D. Kim, S. Nahm, Y. H. Jeong

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A spectroscopic ellipsometry (SE) study was performed on BaSm ₂Ti₄O₁₂ (BSmT) thin films grown on TiN/SiO ₂/c-Si substrate grown by RF-magnetron sputtering. After deposition, the film was annealed at 400 °C under four different conditions of oxygen pressure. For the analysis of the measured spectra, a four-layer model containing a BSmT film was applied, where the optical property of the BSmT layer was represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed that the refractive index and the extinction coefficient of the BSmT films changed consistently with oxygen pressure during the annealing procedure.

Original language	English
Pages (from-to)	1352-1356
Number of pages	5
Journal	Journal of the Korean Physical Society
Volume	53
Issue number	3
DOIs	https://doi.org/10.3938/jkps.53.1352
Publication status	Published - 2008 Sept

Keywords

BSmT
Dielectric function
Ellipsometry
Magnetron sputtering

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.3938/jkps.53.1352

Cite this

@article{0e19b8dfe7cc480f9419240dff4a5f50,

title = "Optical properties of BaSm2Ti4O12 thin films studied by using spectroscopic ellipsometry",

abstract = "A spectroscopic ellipsometry (SE) study was performed on BaSm 2Ti4O12 (BSmT) thin films grown on TiN/SiO 2/c-Si substrate grown by RF-magnetron sputtering. After deposition, the film was annealed at 400 °C under four different conditions of oxygen pressure. For the analysis of the measured spectra, a four-layer model containing a BSmT film was applied, where the optical property of the BSmT layer was represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed that the refractive index and the extinction coefficient of the BSmT films changed consistently with oxygen pressure during the annealing procedure.",

keywords = "BSmT, Dielectric function, Ellipsometry, Magnetron sputtering",

author = "Yoon, {J. J.} and Jung, {Y. W.} and Hwang, {S. Y.} and Kim, {Y. D.} and S. Nahm and Jeong, {Y. H.}",

year = "2008",

month = sep,

doi = "10.3938/jkps.53.1352",

language = "English",

volume = "53",

pages = "1352--1356",

journal = "Journal of the Korean Physical Society",

issn = "0374-4884",

publisher = "Korean Physical Society",

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TY - JOUR

T1 - Optical properties of BaSm2Ti4O12 thin films studied by using spectroscopic ellipsometry

AU - Yoon, J. J.

AU - Jung, Y. W.

AU - Hwang, S. Y.

AU - Kim, Y. D.

AU - Nahm, S.

AU - Jeong, Y. H.

PY - 2008/9

Y1 - 2008/9

N2 - A spectroscopic ellipsometry (SE) study was performed on BaSm 2Ti4O12 (BSmT) thin films grown on TiN/SiO 2/c-Si substrate grown by RF-magnetron sputtering. After deposition, the film was annealed at 400 °C under four different conditions of oxygen pressure. For the analysis of the measured spectra, a four-layer model containing a BSmT film was applied, where the optical property of the BSmT layer was represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed that the refractive index and the extinction coefficient of the BSmT films changed consistently with oxygen pressure during the annealing procedure.

AB - A spectroscopic ellipsometry (SE) study was performed on BaSm 2Ti4O12 (BSmT) thin films grown on TiN/SiO 2/c-Si substrate grown by RF-magnetron sputtering. After deposition, the film was annealed at 400 °C under four different conditions of oxygen pressure. For the analysis of the measured spectra, a four-layer model containing a BSmT film was applied, where the optical property of the BSmT layer was represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed that the refractive index and the extinction coefficient of the BSmT films changed consistently with oxygen pressure during the annealing procedure.

KW - BSmT

KW - Dielectric function

KW - Ellipsometry

KW - Magnetron sputtering

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DO - 10.3938/jkps.53.1352

M3 - Article

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JF - Journal of the Korean Physical Society

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