Optical study of Mn-doped Bi 4Ti 3O 12 thin films by spectroscopic ellipsometry

Soon Yong Hwang; Tae Jung Kim; Jae Jin Yoon; Young Hun Cha; Young Dong Kim; Tae Geun Seong; Lee Seung Kang; Sahn Nahm

doi:10.1166/jnn.2011.3261

Optical study of Mn-doped Bi ₄Ti ₃O ₁₂ thin films by spectroscopic ellipsometry

Soon Yong Hwang, Tae Jung Kim, Jae Jin Yoon, Young Hun Cha, Young Dong Kim, Tae Geun Seong, Lee Seung Kang, Sahn Nahm

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Mn-doped Bi ₄Ti ₃O ₁₂(B ₄T ₃) thin films grown at 400 °C on a Pt/Ti/SiO2/Si substrate through pulsed laser deposition (PLD) were analyzed via spectroscopic ellipsometry (SE). The PLD targets were produced through the conventional solid-state sintering method, and the film samples were annealed at 600 °C. The SE spectra of B ₄T ₃ films were measured using a rotating analyzer type ellipsometer within the 1.12 to 6.52 eV energy range, with the various incidence angles. The optical properties of the B ₄T ₃ films with increasing Mn-mol concentration were extracted using a multilayer model for the whole structure and the Tauc-Lorentz (TL) dispersion relation for the B ₄T ₃ film layer. The analysis results clearly showed that the significant changes in optical properties of B ₄T ₃ films are caused by thermal annealing procedure and the Mn-mol concentrations. X-ray diffraction (XRD) measurement was also performed to confirm the results of SE analysis.

Original language	English
Pages (from-to)	884-888
Number of pages	5
Journal	Journal of Nanoscience and Nanotechnology
Volume	11
Issue number	1
DOIs	https://doi.org/10.1166/jnn.2011.3261
Publication status	Published - 2011 Jan

Keywords

Bi Ti O
Ellipsometry
Mn-doped
Tauc-Lorentz dispersion relation

ASJC Scopus subject areas

Bioengineering
General Chemistry
Biomedical Engineering
General Materials Science
Condensed Matter Physics

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10.1166/jnn.2011.3261

Cite this

@article{a7c236305e824fa3b9f67fb239bc34b6,

title = "Optical study of Mn-doped Bi 4Ti 3O 12 thin films by spectroscopic ellipsometry",

abstract = "Mn-doped Bi 4Ti 3O 12(B 4T 3) thin films grown at 400 °C on a Pt/Ti/SiO2/Si substrate through pulsed laser deposition (PLD) were analyzed via spectroscopic ellipsometry (SE). The PLD targets were produced through the conventional solid-state sintering method, and the film samples were annealed at 600 °C. The SE spectra of B 4T 3 films were measured using a rotating analyzer type ellipsometer within the 1.12 to 6.52 eV energy range, with the various incidence angles. The optical properties of the B 4T 3 films with increasing Mn-mol concentration were extracted using a multilayer model for the whole structure and the Tauc-Lorentz (TL) dispersion relation for the B 4T 3 film layer. The analysis results clearly showed that the significant changes in optical properties of B 4T 3 films are caused by thermal annealing procedure and the Mn-mol concentrations. X-ray diffraction (XRD) measurement was also performed to confirm the results of SE analysis.",

keywords = "Bi Ti O, Ellipsometry, Mn-doped, Tauc-Lorentz dispersion relation",

author = "Hwang, {Soon Yong} and Kim, {Tae Jung} and Yoon, {Jae Jin} and Cha, {Young Hun} and Kim, {Young Dong} and Seong, {Tae Geun} and Kang, {Lee Seung} and Sahn Nahm",

year = "2011",

month = jan,

doi = "10.1166/jnn.2011.3261",

language = "English",

volume = "11",

pages = "884--888",

journal = "Journal of Nanoscience and Nanotechnology",

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T1 - Optical study of Mn-doped Bi 4Ti 3O 12 thin films by spectroscopic ellipsometry

AU - Hwang, Soon Yong

AU - Kim, Tae Jung

AU - Yoon, Jae Jin

AU - Cha, Young Hun

AU - Kim, Young Dong

AU - Seong, Tae Geun

AU - Kang, Lee Seung

AU - Nahm, Sahn

PY - 2011/1

Y1 - 2011/1

N2 - Mn-doped Bi 4Ti 3O 12(B 4T 3) thin films grown at 400 °C on a Pt/Ti/SiO2/Si substrate through pulsed laser deposition (PLD) were analyzed via spectroscopic ellipsometry (SE). The PLD targets were produced through the conventional solid-state sintering method, and the film samples were annealed at 600 °C. The SE spectra of B 4T 3 films were measured using a rotating analyzer type ellipsometer within the 1.12 to 6.52 eV energy range, with the various incidence angles. The optical properties of the B 4T 3 films with increasing Mn-mol concentration were extracted using a multilayer model for the whole structure and the Tauc-Lorentz (TL) dispersion relation for the B 4T 3 film layer. The analysis results clearly showed that the significant changes in optical properties of B 4T 3 films are caused by thermal annealing procedure and the Mn-mol concentrations. X-ray diffraction (XRD) measurement was also performed to confirm the results of SE analysis.

AB - Mn-doped Bi 4Ti 3O 12(B 4T 3) thin films grown at 400 °C on a Pt/Ti/SiO2/Si substrate through pulsed laser deposition (PLD) were analyzed via spectroscopic ellipsometry (SE). The PLD targets were produced through the conventional solid-state sintering method, and the film samples were annealed at 600 °C. The SE spectra of B 4T 3 films were measured using a rotating analyzer type ellipsometer within the 1.12 to 6.52 eV energy range, with the various incidence angles. The optical properties of the B 4T 3 films with increasing Mn-mol concentration were extracted using a multilayer model for the whole structure and the Tauc-Lorentz (TL) dispersion relation for the B 4T 3 film layer. The analysis results clearly showed that the significant changes in optical properties of B 4T 3 films are caused by thermal annealing procedure and the Mn-mol concentrations. X-ray diffraction (XRD) measurement was also performed to confirm the results of SE analysis.

KW - Bi Ti O

KW - Ellipsometry

KW - Mn-doped

KW - Tauc-Lorentz dispersion relation

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