Keyphrases
Circular Notch
100%
Notch Flexure Hinge
100%
Compliant Mechanism
100%
Two-axis
28%
Ultra-precision Stage
28%
Four-link Mechanism
28%
Fine Positioning
28%
Coarse-to-fine
14%
Atomic Force Microscopy
14%
Capacitance
14%
Performance Evaluation
14%
Positioning System
14%
Actuation
14%
Index-based
14%
Design Index
14%
Position Measurement
14%
Translational Motion
14%
Displacement Sensor
14%
Wafer Scanners
14%
Machining Center
14%
Min-max Principle
14%
Precision Positioning Systems
14%
Ultra-precision Positioning
14%
Axial Translation
14%
Global Design
14%
Ultra-precision Machining
14%
Piezoelectric Element
14%
Wafer Stage
14%
Positioning Table
14%
Engineering
Optimal Design
100%
Flexure Hinge
100%
Compliant Mechanism
100%
Link Mechanism
28%
Experimental Result
14%
Actuation
14%
Atomic Force Microscopy
14%
Max
14%
Displacement Sensor
14%
Piezoelectric Element
14%
Machining Centers
14%