Optimal design of a flexure-hinge precision stage with a lever

Eun Joo Hwang; Kyung Suk Min; Shin Hyung Song; Il Hyuk Ahn; Woo Chun Choi

doi:10.1007/BF03026966

Optimal design of a flexure-hinge precision stage with a lever

Eun Joo Hwang, Kyung Suk Min, Shin Hyung Song, Il Hyuk Ahn, Woo Chun Choi

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

Lever mechanisms are usually used to enlarge output displacements in precision stages. A precision stage employing a lever mechanism and flexure hinges is analyzed theoretically, with bending in the lever considered. Relations between design parameters and magnification ratio, and the optimal values for the parameters to achieve a longer stage displacement are presented. Finite element analysis is used to verify the theoretical analysis. It is found that adjustment of lever dimensions and hinge stiffnesses can increase the stage travel range significantly.

Original language	English
Pages (from-to)	616-623
Number of pages	8
Journal	Journal of Mechanical Science and Technology
Volume	21
Issue number	4
DOIs	https://doi.org/10.1007/BF03026966
Publication status	Published - 2007 Apr

Keywords

Design parameter
Flexure hinge
Lever
Magnification ratio
Neck thickness
Output displacement to input force
Spring rate
Stage
Travel range

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering

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10.1007/BF03026966

Cite this

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title = "Optimal design of a flexure-hinge precision stage with a lever",

abstract = "Lever mechanisms are usually used to enlarge output displacements in precision stages. A precision stage employing a lever mechanism and flexure hinges is analyzed theoretically, with bending in the lever considered. Relations between design parameters and magnification ratio, and the optimal values for the parameters to achieve a longer stage displacement are presented. Finite element analysis is used to verify the theoretical analysis. It is found that adjustment of lever dimensions and hinge stiffnesses can increase the stage travel range significantly.",

keywords = "Design parameter, Flexure hinge, Lever, Magnification ratio, Neck thickness, Output displacement to input force, Spring rate, Stage, Travel range",

author = "Hwang, {Eun Joo} and Min, {Kyung Suk} and Song, {Shin Hyung} and Ahn, {Il Hyuk} and Choi, {Woo Chun}",

year = "2007",

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AU - Hwang, Eun Joo

AU - Min, Kyung Suk

AU - Song, Shin Hyung

AU - Ahn, Il Hyuk

AU - Choi, Woo Chun

PY - 2007/4

Y1 - 2007/4

N2 - Lever mechanisms are usually used to enlarge output displacements in precision stages. A precision stage employing a lever mechanism and flexure hinges is analyzed theoretically, with bending in the lever considered. Relations between design parameters and magnification ratio, and the optimal values for the parameters to achieve a longer stage displacement are presented. Finite element analysis is used to verify the theoretical analysis. It is found that adjustment of lever dimensions and hinge stiffnesses can increase the stage travel range significantly.

AB - Lever mechanisms are usually used to enlarge output displacements in precision stages. A precision stage employing a lever mechanism and flexure hinges is analyzed theoretically, with bending in the lever considered. Relations between design parameters and magnification ratio, and the optimal values for the parameters to achieve a longer stage displacement are presented. Finite element analysis is used to verify the theoretical analysis. It is found that adjustment of lever dimensions and hinge stiffnesses can increase the stage travel range significantly.

KW - Design parameter

KW - Flexure hinge

KW - Lever

KW - Magnification ratio

KW - Neck thickness

KW - Output displacement to input force

KW - Spring rate

KW - Stage

KW - Travel range

UR - http://www.scopus.com/inward/record.url?scp=34548153283&partnerID=8YFLogxK

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DO - 10.1007/BF03026966

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VL - 21

SP - 616

EP - 623

JO - Journal of Mechanical Science and Technology

JF - Journal of Mechanical Science and Technology

IS - 4

ER -

Optimal design of a flexure-hinge precision stage with a lever

Abstract

Keywords

ASJC Scopus subject areas

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