Optimal design of a flexure-hinge precision stage with a lever

Eun Joo Hwang, Kyung Suk Min, Shin Hyung Song, Il Hyuk Ahn, Woo Chun Choi

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

Lever mechanisms are usually used to enlarge output displacements in precision stages. A precision stage employing a lever mechanism and flexure hinges is analyzed theoretically, with bending in the lever considered. Relations between design parameters and magnification ratio, and the optimal values for the parameters to achieve a longer stage displacement are presented. Finite element analysis is used to verify the theoretical analysis. It is found that adjustment of lever dimensions and hinge stiffnesses can increase the stage travel range significantly.

Original languageEnglish
Pages (from-to)616-623
Number of pages8
JournalJournal of Mechanical Science and Technology
Volume21
Issue number4
DOIs
Publication statusPublished - 2007 Apr

Keywords

  • Design parameter
  • Flexure hinge
  • Lever
  • Magnification ratio
  • Neck thickness
  • Output displacement to input force
  • Spring rate
  • Stage
  • Travel range

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering

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