@inproceedings{59287de122394cccb16e564d9344bdc0,
title = "Optimal iterative learning control of wafer temperature uniformity in rapid thermal processing",
abstract = "An optimal iterative learning control (ILC) technique based on a quadratic optimal criterion has been implemented and evaluated in an experimental rapid thermal processing (RTP) system fabricating 8-inch silicon wafers. The control technique is based on a time-varying linear state space model which approximates a nonlinear system along a reference trajectory. This ILC control technique is capable of making improvements in the control performance from one run to next and eventually converges to a minimum achievable tracking error despite model error. Through a series of experiments with wafers on which thermocouples are glued, it was observed that the wafer temperatures are steered to the reference trajectory reducing the differences overcoming various disturbances.",
keywords = "Identification, Iterative learning control, LQG, Rapid thermal processing, Time-varying linear state space model",
author = "Lee, {Kwang S.} and Hyojin Ahn and Chin, {In Sik} and Lee, {Jay H.} and Yang, {Dae R.}",
note = "Funding Information: This work was supported by the Korean Ministry of Education through the Brain Korea 21 Project. Authors greatly acknowledge the support from Sangrae Joo, Kornic System Co. for the provision of wafers. J. H. Lee acknowledges the financial support from the National Science Foundation (CTS 9979873). Publisher Copyright: Copyright {\textcopyright} 2002 IFAC.; 15th World Congress of the International Federation of Automatic Control, 2002 ; Conference date: 21-07-2002 Through 26-07-2002",
year = "2002",
doi = "10.3182/20020721-6-es-1901.00624",
language = "English",
isbn = "9783902661746",
series = "IFAC Proceedings Volumes (IFAC-PapersOnline)",
publisher = "IFAC Secretariat",
number = "1",
pages = "333--338",
editor = "Gabriel Ferrate and Camacho, {Eduardo F.} and Luis Basanez and {de la Puente}, {Juan. A.}",
booktitle = "IFAC Proceedings Volumes (IFAC-PapersOnline)",
edition = "1",
}