TY - JOUR
T1 - Optimization of Ru intermediate layer in CoCr-based perpendicular magnetic recording media
AU - Park, Jong Wuk
AU - Kim, Young Keun
AU - Lee, Tae Hyo
AU - Oh, Hoon Sang
AU - Lee, Byung Kyu
PY - 2004/6
Y1 - 2004/6
N2 - The influence of intermediate layer characteristics on the structural and magnetic properties of CoCr-based perpendicular media has been investigated. CoCrPt-SiO2 stacks were deposited on a 2.5-inch glass substrates. To improve intermediate layer properties without noticeable sacrifice of magnetic and structural properties of recording layer, the conditions of intermediate layer deposition were varied. The recording layer was deposited on the Ru intermediate layer in 20 mTorr Ar pressure to increase coercivity. As a result, coercivity is increased from 2.2 to 3.7 kOe because the interface between Ru intermediate layer and recording layer was rougher than the interface formed at low Ar pressure. Additionally, to increase perpendicular anisotropy of recording layer, the Ru sputtering temperature condition was varied, ranging from 150°C to 300°C. However, the perpendicular anisotropy of recording layer was decreased.
AB - The influence of intermediate layer characteristics on the structural and magnetic properties of CoCr-based perpendicular media has been investigated. CoCrPt-SiO2 stacks were deposited on a 2.5-inch glass substrates. To improve intermediate layer properties without noticeable sacrifice of magnetic and structural properties of recording layer, the conditions of intermediate layer deposition were varied. The recording layer was deposited on the Ru intermediate layer in 20 mTorr Ar pressure to increase coercivity. As a result, coercivity is increased from 2.2 to 3.7 kOe because the interface between Ru intermediate layer and recording layer was rougher than the interface formed at low Ar pressure. Additionally, to increase perpendicular anisotropy of recording layer, the Ru sputtering temperature condition was varied, ranging from 150°C to 300°C. However, the perpendicular anisotropy of recording layer was decreased.
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U2 - 10.1002/pssa.200304631
DO - 10.1002/pssa.200304631
M3 - Article
AN - SCOPUS:3142780050
SN - 0031-8965
VL - 201
SP - 1763
EP - 1766
JO - Physica Status Solidi (A) Applied Research
JF - Physica Status Solidi (A) Applied Research
IS - 8
ER -