We report on the optimization of the optical and electrical properties of IGZO/Ag/IGZO multilayer films as a function of IGZO thickness. The transmission window slightly widened and shifted toward lower energies with increasing IGZO thickness. The IGZO(39 nm)/Ag(19 nm)/IGZO(39 nm) showed transmittance 88.7% at 520 nm. The optical transmittance spectra were examined by finite-difference time-domain (FDTD) simulations. The carrier concentration decreased from 1.73 × 10sup22/sup to 4.99 × 10sup21/sup cmsup-3/sup with increasing the IGZO thickness, while the charge mobility insignificantly changed from 19.07 to 19.62 cmsup2/sup/V. The samples had sheet resistances of 4.17-4.39 Ω/sq with increasing IGZO thickness, while the resistivity increased from 1.89 × 10sup-5/sup to 6.43 × 10sup-5/sup Ω cm. The 39 nm-thick IGZO multilayer sample had a smooth surface with a root mean square roughness of 0.63 nm. The IGZO(39 nm)/Ag(19 nm)/IGZO(39 nm) multilayer showed a Haacke's FOM of 49.94 × 10sup-3/sup Ωsup-1/sup.
Bibliographical noteFunding Information:
This work was supported by Korea Evaluation Institute of Industrial Technology (Grant No. 10049601 ). S.-K.K. was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT & Future Planning ( NRF-2013R1A1A1059423 ).
© 2015 Elsevier B.V.
- Indium gallium zinc oxide Ag Multilayer Transparent conducting electrode
ASJC Scopus subject areas
- Materials Science(all)
- Physics and Astronomy(all)