We have developed a coherent and compact extreme-ultraviolet light source based on phase-matched high harmonic generation by using a hollow-core gas cell that can be easily aligned and maintain long stability. The gas cell consists of three bodies to minimize gas leakage and maintain stable vacuum. The photon flux was calculated considering the dependence of the gas number density and the pressure on the radii of the hollow core and the hole in the Al plates on both sides of the gas cell, which showed good coincidence with the experimental values. The photon flux is 2 × 1010 photons s−1 near 13.5 nm (91.5 eV) within 10 nm bandwidth. Also, the compact extreme-ultraviolet light source is found to operate stably for hours, which is suitable for practical applications such as metrology and inspection for extreme-ultraviolet mask, spectroscopy, holography, microscopy, etc.
Bibliographical noteFunding Information:
This work was supported by the Korea Medical Device Development Fund grant funded by the Korea government (the Ministry of Science and ICT, the Ministry of Trade, Industry and Energy, the Ministry of Health & Welfare, the Ministry of Food and Drug Safety) (Project Number: KMDF_PR_202011D12, 9991006748) and the National Research Foundation of Korea (NRF) funded by the Korea government (MSIT) (No. 2020R1A2C2005486).
- Coherent soft x-ray
- High harmonic generation
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering