Oxygen plasma effects on sol-gel-derived lead-zirconate-titanate thin films

H. K. Jang; S. K. Lee; Cheol Eui Lee; S. J. Noh; W. I. Lee

doi:10.1063/1.125617

Oxygen plasma effects on sol-gel-derived lead-zirconate-titanate thin films

H. K. Jang, S. K. Lee, Cheol Eui Lee, S. J. Noh, W. I. Lee

Department of Physics

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

We studied effects of oxygen plasma treatment on the ferroelectric Pb(Zr_x,Ti_1-x)O₃ (PZT) films prepared by a sol-gel method. Electrical characteristics of the films were found to be improved considerably by exposure to the O₂ plasma, with enhanced remanent polarization and decreased leakage current densities. Chemical bonding analysis by means of x-ray photoelectron spectroscopy in the Pb 4f region indicated that the intensity from the perovskite PZT phase increased considerably after the O₂ plasma treatment, giving rise to the improved performances of the PZT films.

Original language	English
Pages (from-to)	882-884
Number of pages	3
Journal	Applied Physics Letters
Volume	76
Issue number	7
DOIs	https://doi.org/10.1063/1.125617
Publication status	Published - 2000 Feb 14

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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abstract = "We studied effects of oxygen plasma treatment on the ferroelectric Pb(Zrx,Ti1-x)O3 (PZT) films prepared by a sol-gel method. Electrical characteristics of the films were found to be improved considerably by exposure to the O2 plasma, with enhanced remanent polarization and decreased leakage current densities. Chemical bonding analysis by means of x-ray photoelectron spectroscopy in the Pb 4f region indicated that the intensity from the perovskite PZT phase increased considerably after the O2 plasma treatment, giving rise to the improved performances of the PZT films.",

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AU - Jang, H. K.

AU - Lee, S. K.

AU - Lee, Cheol Eui

AU - Noh, S. J.

AU - Lee, W. I.

PY - 2000/2/14

Y1 - 2000/2/14

N2 - We studied effects of oxygen plasma treatment on the ferroelectric Pb(Zrx,Ti1-x)O3 (PZT) films prepared by a sol-gel method. Electrical characteristics of the films were found to be improved considerably by exposure to the O2 plasma, with enhanced remanent polarization and decreased leakage current densities. Chemical bonding analysis by means of x-ray photoelectron spectroscopy in the Pb 4f region indicated that the intensity from the perovskite PZT phase increased considerably after the O2 plasma treatment, giving rise to the improved performances of the PZT films.

AB - We studied effects of oxygen plasma treatment on the ferroelectric Pb(Zrx,Ti1-x)O3 (PZT) films prepared by a sol-gel method. Electrical characteristics of the films were found to be improved considerably by exposure to the O2 plasma, with enhanced remanent polarization and decreased leakage current densities. Chemical bonding analysis by means of x-ray photoelectron spectroscopy in the Pb 4f region indicated that the intensity from the perovskite PZT phase increased considerably after the O2 plasma treatment, giving rise to the improved performances of the PZT films.

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JF - Applied Physics Letters

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Oxygen plasma effects on sol-gel-derived lead-zirconate-titanate thin films

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