Palladium nanogap-based H2 sensors on a patterned elastomeric substrate using nanoimprint lithography

Byungjin Jang, Sungmee Cho, Cheolmin Park, Heon Lee, Min Jung Song, Wooyoung Lee

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)


Here we report a new nanogap formation manner at edges of a palladium (Pd) thin film on highly patterned arrays of an elastomeric PDMS substrate fabricated nanoimprint lithography (NIL) by absorption/desorption cycles of H2 for use in the detection of hydrogen (H2) gas. A 10-nm-thick Pd layer was deposited on the patterned PDMS substrate using an ultra-high vacuum DC magnetron sputtering system. The Pd nanogaps (∼100 nm (W)) formed on the edges of the grating structure by expansion and contraction of the film through a few cycles of H2 absorption and desorption. Such nanogaps are crucial to the performance of the sensors. The H2 sensors were found to exhibit a fast response time (∼1 s), low detection limit (0.1%), wide linear range (0.1-2%), and an ON-OFF switching operation in air. These properties are attributed to the synergistic combination of nanogap break junction control in Pd and the patterned elastomeric substrate.

Original languageEnglish
Pages (from-to)593-598
Number of pages6
JournalSensors and Actuators, B: Chemical
Publication statusPublished - 2015 Jul 20

Bibliographical note

Funding Information:
This work was supported by the Priority Research Centers Program ( 2009-0093823 ) through the National Research Foundation of Korea (NRF).

Publisher Copyright:
© 2015, Elsevier B.V. All rights reserved.


  • Hydrogen sensors
  • Nanogap
  • Palladium (Pd)
  • Poly(dimethylsiloxane) (PDMS)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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