Patterned multiwall carbon nanotube films as materials of NO2 gas sensors

Woo Sung Cho; Seung Il Moon; Kyeong Kap Paek; Yun Hi Lee; Jung Ho Park; Byeong Kwon Ju

doi:10.1016/j.snb.2005.12.004

Patterned multiwall carbon nanotube films as materials of NO₂ gas sensors

Woo Sung Cho, Seung Il Moon, Kyeong Kap Paek, Yun Hi Lee, Jung Ho Park, Byeong Kwon Ju

Research output: Contribution to journal › Article › peer-review

72 Citations (Scopus)

Abstract

Multiwall carbon nanotube (MWNT) films grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm have been investigated as sensing materials of resistive gas sensors for nitrogen dioxide (NO₂). We fabricated the aligned MWNT films, which grew into mesh and serpentine shapes by photolithography. Photolithography patterned the cobalt catalyst layer. MWNT films showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to NO₂. The sensor exhibited a reversible response at a thermal treatment temperature of 130 °C for a time constant of a few minutes. The resistance change to NO₂ of the mesh-shaped MWNT films was found to be larger than that of the serpentine-shaped MWNT films.

Original language	English
Pages (from-to)	180-185
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	119
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2005.12.004
Publication status	Published - 2006 Nov 24

Bibliographical note

Funding Information:
This research has been supported by the Intelligent Microsystem Center (IMC), which carries out one of the 21st century's Frontier R&D Projects sponsored by the Korea Ministry of Commerce, Industry and Energy.

Keywords

Diaphragm
Multiwall carbon nanotubes
Nitrogen dioxide (NO)
Resistive gas sensor
Reversible response
Thermal chemical vapor deposition (CVD)

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

Access to Document

10.1016/j.snb.2005.12.004

Cite this

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abstract = "Multiwall carbon nanotube (MWNT) films grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm have been investigated as sensing materials of resistive gas sensors for nitrogen dioxide (NO2). We fabricated the aligned MWNT films, which grew into mesh and serpentine shapes by photolithography. Photolithography patterned the cobalt catalyst layer. MWNT films showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to NO2. The sensor exhibited a reversible response at a thermal treatment temperature of 130 °C for a time constant of a few minutes. The resistance change to NO2 of the mesh-shaped MWNT films was found to be larger than that of the serpentine-shaped MWNT films.",

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AU - Moon, Seung Il

AU - Paek, Kyeong Kap

AU - Lee, Yun Hi

AU - Park, Jung Ho

AU - Ju, Byeong Kwon

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