PDMS-based micro PCR chip with Parylene coating

Young Shik Shin, Keunchang Cho, Sun Hee Lim, Seok Chung, Sung Jin Park, Chanil Chung, Dong Chul Han, Jun Keun Chang

Research output: Contribution to journalArticlepeer-review

317 Citations (Scopus)


We have developed a microchip for polymerase chain reaction (PCR) with polydimethylsiloxane (PDMS). PDMS has good characteristics: it is cheap, transparent, easy to fabricate and biocompatible. But in micro PCR, the porosity of PDMS causes several critical problems such as bubble formation, sample evaporation and protein adsorption. To solve those problems, we coated the micro PCR chips with Parylene film, which has low permeability to moisture and long-term stability. We investigated the influence of low thermal conductivity of PDMS and Parylene on the thermal characteristics of the PCR chips with numerical analysis. The thermal responses of micro PCR chips were compared for three materials: silicon, glass and PDMS. From the results, we identified appropriate thermal responses of the PDMS-based micro PCR chips by heating both the top and bottom sides. We could successfully amplify the angiotensin converting enzyme gene with as small a volume as 2 μl on the PDMS-based micro PCR chips without any additives.

Original languageEnglish
Pages (from-to)768-774
Number of pages7
JournalJournal of Micromechanics and Microengineering
Issue number5
Publication statusPublished - 2003 Sept
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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