Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror

Hanbit Kim; Hyunho Jung; Dong Hyun Lee; Kyu Back Lee; Heonsu Jeon

doi:10.1364/AO.55.000354

Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror

Hanbit Kim, Hyunho Jung, Dong Hyun Lee, Kyu Back Lee, Heonsu Jeon

School of Biomedical Engineering

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Λ ≈ 600 nm exhibits a continuous period variation of ΔΛ = 92 nm across 17 mm width.

Original language	English
Pages (from-to)	354-359
Number of pages	6
Journal	Applied optics
Volume	55
Issue number	2
DOIs	https://doi.org/10.1364/AO.55.000354
Publication status	Published - 2016 Jan 10

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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title = "Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror",

abstract = "We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Λ ≈ 600 nm exhibits a continuous period variation of ΔΛ = 92 nm across 17 mm width.",

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AU - Kim, Hanbit

AU - Jung, Hyunho

AU - Lee, Dong Hyun

AU - Lee, Kyu Back

AU - Jeon, Heonsu

PY - 2016/1/10

Y1 - 2016/1/10

N2 - We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Λ ≈ 600 nm exhibits a continuous period variation of ΔΛ = 92 nm across 17 mm width.

AB - We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Λ ≈ 600 nm exhibits a continuous period variation of ΔΛ = 92 nm across 17 mm width.

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Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror

Abstract

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