Photo-enhanced acid chemical etching of high-quality aluminum nitride grown by metal-organic chemical vapor deposition

Yong ha Choi, Kwang Hyeon Baik, Rakjun Choi, Jeongtak Oh, Jihyun Kim

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Photo-enhanced acid chemical etching of high-quality aluminum nitride grown by metal-organic chemical vapor deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds