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Plasma resistance of Y2O3 nanofilms on quartz with different interlayer deposited by EB-PVD
- Dae Min Kim
- , Sung Min Lee
- , In Ki Kim
- , Byung Koog Jang
- , Dae Soon Lim
- , Yoon Suk Oh*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
2
Citations
(Scopus)