Point defect induced degradation of electrical properties of Ga2O3 by 10 MeV proton damage

  • A. Y. Polyakov
  • , N. B. Smirnov
  • , I. V. Shchemerov
  • , E. B. Yakimov
  • , Jiancheng Yang
  • , F. Ren
  • , Gwangseok Yang
  • , Jihyun Kim
  • , A. Kuramata
  • , S. J. Pearton

    Research output: Contribution to journal › Article › peer-review

    143 Citations (Scopus)

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    Keyphrases

    Engineering

    Chemistry

    Material Science

    Physics