@article{8d1406463f704693ad59f069bd50364f,
title = "Preface proceedings of the 7th International Conference on Microelectronics and Plasma Technology (ICMAP 2018), Incheon, Korea",
author = "Lee, {Nae Eung} and Chae, {Hee Yeop} and Chung, {Chee Won} and Kim, {Hyun Woo} and Kim, {Hyoung Sub} and Kim, {Ji Hyun} and Jiyoung Kim and Taeyoon Lee and Park, {In Sung} and Pu, {Yi Kang} and Jianjun Shi and Ping Xu",
year = "2019",
month = jun,
day = "30",
doi = "10.1016/j.tsf.2019.03.027",
language = "English",
volume = "680",
pages = "37--39",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
}