Preparation and property characterization of oriented PLZT thin films processed using sol-gel method

Sung Yoon Dae; Jung Kim Chang; Sung Lee Joon; Gi Choi Chaun; Jong Lee Won; Kwangsoo No

Preparation and property characterization of oriented PLZT thin films processed using sol-gel method

Sung Yoon Dae, Jung Kim Chang, Sung Lee Joon, Gi Choi Chaun, Jong Lee Won, Kwangsoo No

Research output: Contribution to journal › Conference article › peer-review

Abstract

Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTi0₃(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600 °C and 700 °C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO₃, sapphire, and Pt/Ti/MgO, respectively.The dielectric and optical properties of both the oriented films and the polycrystalline films were measured and discussed.

Original language	English
Pages (from-to)	499-504
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	343
Publication status	Published - 1994
Externally published	Yes
Event	Proceedings of the 1994 MRS Spring Meeting - San Francisco, CA, USA Duration: 1994 Apr 5 → 1994 Apr 7

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

@article{63562f4c9bb44f01b02275ee9887f6b3,

title = "Preparation and property characterization of oriented PLZT thin films processed using sol-gel method",

abstract = "Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTi03(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600 °C and 700 °C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO3, sapphire, and Pt/Ti/MgO, respectively.The dielectric and optical properties of both the oriented films and the polycrystalline films were measured and discussed.",

author = "Dae, {Sung Yoon} and Chang, {Jung Kim} and Joon, {Sung Lee} and Chaun, {Gi Choi} and Won, {Jong Lee} and Kwangsoo No",

year = "1994",

language = "English",

volume = "343",

pages = "499--504",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1994 MRS Spring Meeting ; Conference date: 05-04-1994 Through 07-04-1994",

}

TY - JOUR

T1 - Preparation and property characterization of oriented PLZT thin films processed using sol-gel method

AU - Dae, Sung Yoon

AU - Chang, Jung Kim

AU - Joon, Sung Lee

AU - Chaun, Gi Choi

AU - Won, Jong Lee

AU - No, Kwangsoo

PY - 1994

Y1 - 1994

N2 - Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTi03(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600 °C and 700 °C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO3, sapphire, and Pt/Ti/MgO, respectively.The dielectric and optical properties of both the oriented films and the polycrystalline films were measured and discussed.

AB - Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTi03(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600 °C and 700 °C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO3, sapphire, and Pt/Ti/MgO, respectively.The dielectric and optical properties of both the oriented films and the polycrystalline films were measured and discussed.

UR - http://www.scopus.com/inward/record.url?scp=0028583002&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0028583002

SN - 0272-9172

VL - 343

SP - 499

EP - 504

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1994 MRS Spring Meeting

Y2 - 5 April 1994 through 7 April 1994

ER -

Preparation and property characterization of oriented PLZT thin films processed using sol-gel method

Abstract

ASJC Scopus subject areas

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