TY - JOUR
T1 - Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process
AU - Do, Young Ho
AU - Sukjung, Woo
AU - Kang, Min Gyu
AU - Kang, Chong Yun
AU - Yoon, Seokjin
N1 - Funding Information:
This research was supported by the Fusion Research Program for Green Technologies through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (No. 2011-0000001 ) and the institutional research program of Korea Institute of Science and Technology (contract No.2E22731).
PY - 2013
Y1 - 2013
N2 - The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.
AB - The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.
KW - Ferroelectric properties
KW - Films process
KW - Functional applications
KW - Laser lift-off
KW - PZT
KW - Transparent flexible electronics
UR - http://www.scopus.com/inward/record.url?scp=84885388546&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2012.10.034
DO - 10.1016/j.sna.2012.10.034
M3 - Article
AN - SCOPUS:84885388546
SN - 0924-4247
VL - 200
SP - 51
EP - 55
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
ER -