Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process

Young Ho Do; Woo Sukjung; Min Gyu Kang; Chong Yun Kang; Seokjin Yoon

doi:10.1016/j.sna.2012.10.034

Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process

Young Ho Do, Woo Sukjung, Min Gyu Kang, Chong Yun Kang, Seokjin Yoon

Research output: Contribution to journal › Article › peer-review

58 Citations (Scopus)

Abstract

The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr_0.52Ti_0.48O₃ (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm², at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.

Original language	English
Pages (from-to)	51-55
Number of pages	5
Journal	Sensors and Actuators, A: Physical
Volume	200
DOIs	https://doi.org/10.1016/j.sna.2012.10.034
Publication status	Published - 2013

Bibliographical note

Funding Information:
This research was supported by the Fusion Research Program for Green Technologies through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (No. 2011-0000001 ) and the institutional research program of Korea Institute of Science and Technology (contract No.2E22731).

Keywords

Ferroelectric properties
Films process
Functional applications
Laser lift-off
PZT
Transparent flexible electronics

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2012.10.034

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title = "Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process",

abstract = "The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.",

keywords = "Ferroelectric properties, Films process, Functional applications, Laser lift-off, PZT, Transparent flexible electronics",

author = "Do, {Young Ho} and Woo Sukjung and Kang, {Min Gyu} and Kang, {Chong Yun} and Seokjin Yoon",

note = "Funding Information: This research was supported by the Fusion Research Program for Green Technologies through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (No. 2011-0000001 ) and the institutional research program of Korea Institute of Science and Technology (contract No.2E22731). ",

year = "2013",

doi = "10.1016/j.sna.2012.10.034",

language = "English",

volume = "200",

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journal = "Sensors and Actuators, A: Physical",

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T1 - Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process

AU - Do, Young Ho

AU - Sukjung, Woo

AU - Kang, Min Gyu

AU - Kang, Chong Yun

AU - Yoon, Seokjin

N1 - Funding Information: This research was supported by the Fusion Research Program for Green Technologies through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (No. 2011-0000001 ) and the institutional research program of Korea Institute of Science and Technology (contract No.2E22731).

PY - 2013

Y1 - 2013

N2 - The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.

AB - The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.

KW - Ferroelectric properties

KW - Films process

KW - Functional applications

KW - Laser lift-off

KW - PZT

KW - Transparent flexible electronics

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SN - 0924-4247

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JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

ER -

Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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