Printed silicon broadband membrane reflectors by laser interference lithography

Hyeon Jun Ha, Jungho Park, Bo Yeon Hwang, Sangbin Lee, Byeong Kwon Ju

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We report on printed silicon photonic crystal broadband membrane reflectors (MRs) based on laser interference lithography (LIL) patterning. Single-layer photonic crystal membrane which was formed by the LIL technique on a silicon-on-insulator (SOI) wafer was transferred by the contact printing method using the polydimethylsiloxane (PDMS) stamp on a glass substrate. These broadband silicon-MRs show high-reflectivity of 95 % around 1200 nm wavelength with bandwidth of about 100 nm. This simplest and easiest method to fabricate broadband MRs has great potential for many types of optoelectronic and photonic devices.

    Original languageEnglish
    Title of host publicationCAS 2013 Proceedings - 2013 International Semiconductor Conference
    Pages123-126
    Number of pages4
    DOIs
    Publication statusPublished - 2013
    Event36th International Semiconductor Conference, CAS 2013 - Sinaia, Romania
    Duration: 2013 Oct 142013 Oct 16

    Publication series

    NameProceedings of the International Semiconductor Conference, CAS
    Volume1

    Conference

    Conference36th International Semiconductor Conference, CAS 2013
    Country/TerritoryRomania
    CitySinaia
    Period13/10/1413/10/16

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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