@inproceedings{755d0ea6b8d0416bb0d52afddc25f3bd,
title = "Printed silicon broadband membrane reflectors by laser interference lithography",
abstract = "We report on printed silicon photonic crystal broadband membrane reflectors (MRs) based on laser interference lithography (LIL) patterning. Single-layer photonic crystal membrane which was formed by the LIL technique on a silicon-on-insulator (SOI) wafer was transferred by the contact printing method using the polydimethylsiloxane (PDMS) stamp on a glass substrate. These broadband silicon-MRs show high-reflectivity of 95 % around 1200 nm wavelength with bandwidth of about 100 nm. This simplest and easiest method to fabricate broadband MRs has great potential for many types of optoelectronic and photonic devices.",
author = "Ha, {Hyeon Jun} and Jungho Park and Hwang, {Bo Yeon} and Sangbin Lee and Ju, {Byeong Kwon}",
year = "2013",
doi = "10.1109/SMICND.2013.6688107",
language = "English",
isbn = "9781467356701",
series = "Proceedings of the International Semiconductor Conference, CAS",
pages = "123--126",
booktitle = "CAS 2013 Proceedings - 2013 International Semiconductor Conference",
note = "36th International Semiconductor Conference, CAS 2013 ; Conference date: 14-10-2013 Through 16-10-2013",
}