Printed silicon broadband membrane reflectors by laser interference lithography

Hyeon Jun Ha, Jungho Park, Bo Yeon Hwang, Sangbin Lee, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We report on printed silicon photonic crystal broadband membrane reflectors (MRs) based on laser interference lithography (LIL) patterning. Single-layer photonic crystal membrane which was formed by the LIL technique on a silicon-on-insulator (SOI) wafer was transferred by the contact printing method using the polydimethylsiloxane (PDMS) stamp on a glass substrate. These broadband silicon-MRs show high-reflectivity of 95 % around 1200 nm wavelength with bandwidth of about 100 nm. This simplest and easiest method to fabricate broadband MRs has great potential for many types of optoelectronic and photonic devices.

Original languageEnglish
Title of host publicationCAS 2013 Proceedings - 2013 International Semiconductor Conference
Number of pages4
Publication statusPublished - 2013
Event36th International Semiconductor Conference, CAS 2013 - Sinaia, Romania
Duration: 2013 Oct 142013 Oct 16

Publication series

NameProceedings of the International Semiconductor Conference, CAS


Conference36th International Semiconductor Conference, CAS 2013

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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