Prototype microactuators driven by magnetostrictive thin films

S. H. Lim, S. H. Han, H. J. Kim, Y. S. Choi, Jin Woo Choi, C. H. Ahn

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Si microcantilevers coated with giant magnetostrictive Sih-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length) × 1.0 mm (width) × 13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.

Original languageEnglish
Pages (from-to)2039-2041
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number4 PART 1
Publication statusPublished - 1998
Externally publishedYes


  • Magnetostrictive thin films
  • Microcantilevers
  • Sm-fe alloys
  • Tb-fe alloys

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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