Prototype microactuators driven by magnetostrictive thin films

S. H. Lim; S. H. Han; H. J. Kim; Y. S. Choi; Jin Woo Choi; C. H. Ahn

doi:10.1109/20.706786

Prototype microactuators driven by magnetostrictive thin films

S. H. Lim, S. H. Han, H. J. Kim, Y. S. Choi, Jin Woo Choi, C. H. Ahn

Research output: Contribution to journal › Conference article › peer-review

12 Citations (Scopus)

Abstract

Si microcantilevers coated with giant magnetostrictive Sm-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length)×1.0 mm (width)×13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm_42.7Fe_56.9B_0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.

Original language	English
Pages (from-to)	2042-2044
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	34
Issue number	4 pt 1
DOIs	https://doi.org/10.1109/20.706786
Publication status	Published - 1998 Jul
Externally published	Yes
Event	Proceedings of the 1998 7th Joint Magnetism and Magnetic Materials - International Magnetics Conference. Part 1 (of 2) - San Francisco, CA, USA Duration: 1998 Jan 6 → 1998 Jan 9

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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Cite this

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title = "Prototype microactuators driven by magnetostrictive thin films",

abstract = "Si microcantilevers coated with giant magnetostrictive Sm-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length)×1.0 mm (width)×13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.",

author = "Lim, {S. H.} and Han, {S. H.} and Kim, {H. J.} and Choi, {Y. S.} and Choi, {Jin Woo} and Ahn, {C. H.}",

year = "1998",

month = jul,

doi = "10.1109/20.706786",

language = "English",

volume = "34",

pages = "2042--2044",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4 pt 1",

note = "Proceedings of the 1998 7th Joint Magnetism and Magnetic Materials - International Magnetics Conference. Part 1 (of 2) ; Conference date: 06-01-1998 Through 09-01-1998",

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TY - JOUR

T1 - Prototype microactuators driven by magnetostrictive thin films

AU - Lim, S. H.

AU - Han, S. H.

AU - Kim, H. J.

AU - Choi, Y. S.

AU - Choi, Jin Woo

AU - Ahn, C. H.

PY - 1998/7

Y1 - 1998/7

N2 - Si microcantilevers coated with giant magnetostrictive Sm-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length)×1.0 mm (width)×13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.

AB - Si microcantilevers coated with giant magnetostrictive Sm-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length)×1.0 mm (width)×13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.

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DO - 10.1109/20.706786

M3 - Conference article

AN - SCOPUS:0032117836

SN - 0018-9464

VL - 34

SP - 2042

EP - 2044

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 4 pt 1

T2 - Proceedings of the 1998 7th Joint Magnetism and Magnetic Materials - International Magnetics Conference. Part 1 (of 2)

Y2 - 6 January 1998 through 9 January 1998

ER -

Prototype microactuators driven by magnetostrictive thin films

Abstract

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