Prototype microactuators driven by magnetostrictive thin films

S. H. Lim; S. H. Han; H. J. Kim; Y. S. Choi; Jin Woo Choi; C. H. Ahn

doi:10.1109/20.706785

Prototype microactuators driven by magnetostrictive thin films

S. H. Lim^*
, S. H. Han
, H. J. Kim
, Y. S. Choi
, Jin Woo Choi
, C. H. Ahn

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Si microcantilevers coated with giant magnetostrictive Sih-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length) × 1.0 mm (width) × 13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm_42.7Fe_56.9B_0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.

Original language	English
Pages (from-to)	2039-2041
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	34
Issue number	4 PART 1
DOIs	https://doi.org/10.1109/20.706785
Publication status	Published - 1998
Externally published	Yes

Keywords

Magnetostrictive thin films
Microcantilevers
Sm-fe alloys
Tb-fe alloys

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/20.706785

Cite this

@article{ac804888e80d46d6baa1ab8d0c5c463a,

title = "Prototype microactuators driven by magnetostrictive thin films",

abstract = "Si microcantilevers coated with giant magnetostrictive Sih-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length) × 1.0 mm (width) × 13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.",

keywords = "Magnetostrictive thin films, Microcantilevers, Sm-fe alloys, Tb-fe alloys",

author = "Lim, \{S. H.\} and Han, \{S. H.\} and Kim, \{H. J.\} and Choi, \{Y. S.\} and Choi, \{Jin Woo\} and Ahn, \{C. H.\}",

year = "1998",

doi = "10.1109/20.706785",

language = "English",

volume = "34",

pages = "2039--2041",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4 PART 1",

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TY - JOUR

T1 - Prototype microactuators driven by magnetostrictive thin films

AU - Lim, S. H.

AU - Han, S. H.

AU - Kim, H. J.

AU - Choi, Y. S.

AU - Choi, Jin Woo

AU - Ahn, C. H.

PY - 1998

Y1 - 1998

N2 - Si microcantilevers coated with giant magnetostrictive Sih-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length) × 1.0 mm (width) × 13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.

AB - Si microcantilevers coated with giant magnetostrictive Sih-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length) × 1.0 mm (width) × 13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications.

KW - Magnetostrictive thin films

KW - Microcantilevers

KW - Sm-fe alloys

KW - Tb-fe alloys

UR - https://www.scopus.com/pages/publications/33747928614

U2 - 10.1109/20.706785

DO - 10.1109/20.706785

M3 - Article

AN - SCOPUS:33747928614

SN - 0018-9464

VL - 34

SP - 2039

EP - 2041

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 4 PART 1

ER -

Prototype microactuators driven by magnetostrictive thin films

Abstract

Keywords

ASJC Scopus subject areas

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