Purification of chemical mechanical polishing wastewater via superconducting high gradient magnetic separation system with optimal coagulation process

Young Gyun Kim; Jung Bin Song; Dong Gyu Yang; Woo Jin Kim; Sang Hyun Kim; Haigun Lee

doi:10.1109/TASC.2014.2365559

Purification of chemical mechanical polishing wastewater via superconducting high gradient magnetic separation system with optimal coagulation process

Young Gyun Kim, Jung Bin Song, Dong Gyu Yang, Woo Jin Kim, Sang Hyun Kim, Haigun Lee^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

This study examined the purification of wastewater from the chemical mechanical polishing (CMP) process via a superconducting high gradient magnetic separation (HGMS) system. To remove silica, the main contaminant in CMP wastewater, the optimal coagulation process of silica-magnetite-ferric hydroxide aggregates was empirically determined. Filtration tests via superconducting HGMS system with optimal coagulation process were conducted with respect to the magnetic field and wastewater flow rate. The turbidity and Si concentration of the wastewater filtered at 2 T and 400 mL/min were in accordance with the grey water standard and reverse osmosis (RO) feed water requirement, which demonstrated the feasibility of the superconducting HGMS system for the purification of CMP wastewater.

Original language	English
Article number	6937149
Journal	IEEE Transactions on Applied Superconductivity
Volume	25
Issue number	3
DOIs	https://doi.org/10.1109/TASC.2014.2365559
Publication status	Published - 2015 Jun 1

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

Keywords

Chemical mechanical polishing
filtration
high gradient magnetic separation
wastewater

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/TASC.2014.2365559

Cite this

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title = "Purification of chemical mechanical polishing wastewater via superconducting high gradient magnetic separation system with optimal coagulation process",

abstract = "This study examined the purification of wastewater from the chemical mechanical polishing (CMP) process via a superconducting high gradient magnetic separation (HGMS) system. To remove silica, the main contaminant in CMP wastewater, the optimal coagulation process of silica-magnetite-ferric hydroxide aggregates was empirically determined. Filtration tests via superconducting HGMS system with optimal coagulation process were conducted with respect to the magnetic field and wastewater flow rate. The turbidity and Si concentration of the wastewater filtered at 2 T and 400 mL/min were in accordance with the grey water standard and reverse osmosis (RO) feed water requirement, which demonstrated the feasibility of the superconducting HGMS system for the purification of CMP wastewater.",

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author = "Kim, \{Young Gyun\} and Song, \{Jung Bin\} and Yang, \{Dong Gyu\} and Kim, \{Woo Jin\} and Kim, \{Sang Hyun\} and Haigun Lee",

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doi = "10.1109/TASC.2014.2365559",

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AU - Kim, Young Gyun

AU - Song, Jung Bin

AU - Yang, Dong Gyu

AU - Kim, Woo Jin

AU - Kim, Sang Hyun

AU - Lee, Haigun

PY - 2015/6/1

Y1 - 2015/6/1

N2 - This study examined the purification of wastewater from the chemical mechanical polishing (CMP) process via a superconducting high gradient magnetic separation (HGMS) system. To remove silica, the main contaminant in CMP wastewater, the optimal coagulation process of silica-magnetite-ferric hydroxide aggregates was empirically determined. Filtration tests via superconducting HGMS system with optimal coagulation process were conducted with respect to the magnetic field and wastewater flow rate. The turbidity and Si concentration of the wastewater filtered at 2 T and 400 mL/min were in accordance with the grey water standard and reverse osmosis (RO) feed water requirement, which demonstrated the feasibility of the superconducting HGMS system for the purification of CMP wastewater.

AB - This study examined the purification of wastewater from the chemical mechanical polishing (CMP) process via a superconducting high gradient magnetic separation (HGMS) system. To remove silica, the main contaminant in CMP wastewater, the optimal coagulation process of silica-magnetite-ferric hydroxide aggregates was empirically determined. Filtration tests via superconducting HGMS system with optimal coagulation process were conducted with respect to the magnetic field and wastewater flow rate. The turbidity and Si concentration of the wastewater filtered at 2 T and 400 mL/min were in accordance with the grey water standard and reverse osmosis (RO) feed water requirement, which demonstrated the feasibility of the superconducting HGMS system for the purification of CMP wastewater.

KW - Chemical mechanical polishing

KW - filtration

KW - high gradient magnetic separation

KW - wastewater

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DO - 10.1109/TASC.2014.2365559

M3 - Article

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SN - 1051-8223

VL - 25

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

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M1 - 6937149

ER -

Purification of chemical mechanical polishing wastewater via superconducting high gradient magnetic separation system with optimal coagulation process

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

UN SDGs

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