Quantitative scanning thermal microscopy using double scan technique

Kyeongtae Kim, Jaehoon Chung, Jongbo Won, Ohmyoung Kwon, Joon Sik Lee, Seung Ho Park, Young Ki Choi

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62 Citations (Scopus)


Although scanning thermal microscope has shown the highest spatial resolution in local temperature and thermophysical property measurement, its usefulness has been severely limited due to difficulties in quantitative measurement. We propose a double scan technique that measures temperature only from the heat transfer through the tip-sample contact by the subtraction of the signal due to the heat transfer through the air. A rigorous theoretical model for this technique is derived. The effectiveness of the double scan technique in quantitative temperature measurement is demonstrated experimentally.

Original languageEnglish
Article number203115
JournalApplied Physics Letters
Issue number20
Publication statusPublished - 2008

Bibliographical note

Funding Information:
This work was supported by the overseas laboratory program of Micro Thermal System Research Center, Seoul National University, sponsored by the Korean Science and Engineering Foundation (R11–2001–095–00003–0). The authors thank Professor Arun Majumdar at University of California at Berkeley for the helpful discussions.

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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