R&D activities for nanoscale manufacturing processes and enabling equipment in Korea

Chang Soo Han, Jun Hyuk Choi, Hak Joo Lee, Jae Jong Lee, Doo Sun Choi, Won Seok Chang, Jun Ho Jeong, Eung Sug Lee, Kyung Hyun Whang, Sang Rok Lee

Research output: Chapter in Book/Report/Conference proceedingChapter

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Engineering & Materials Science