Reactive sputtering of Al2O3 on AlGaN/GaN heterostructure field-effect transistor

J. Jhin, H. Kang, D. Byun, D. Kim, I. Adesida

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Reactive sputtering of Al2O3 on AlGaN/GaN heterostructure field-effect transistor'. Together they form a unique fingerprint.

Engineering

Material Science

Keyphrases