TY - GEN
T1 - Receptor-coated porous silicon resonators for enhanced sensitivity of vapor detection
AU - Hwang, Yongha
AU - Kim, Sungmin
AU - Candler, Rob N.
PY - 2011
Y1 - 2011
N2 - We present microscale silicon resonators with nanoscale pores for increased surface area, which are capable of providing enhanced sensitivity in vapor sensors. Increased mechanical stability and detection performance are also achieved by keeping parts of the resonating device nonporous and adding a receptor coating. We demonstrate improvements up to 165% and 654% in resonator sensitivity to isopropyl alcohol (IPA) for partially-porous silicon resonators and receptor-coated partially-porous silicon resonators, respectively, as compared to nonporous silicon resonators.
AB - We present microscale silicon resonators with nanoscale pores for increased surface area, which are capable of providing enhanced sensitivity in vapor sensors. Increased mechanical stability and detection performance are also achieved by keeping parts of the resonating device nonporous and adding a receptor coating. We demonstrate improvements up to 165% and 654% in resonator sensitivity to isopropyl alcohol (IPA) for partially-porous silicon resonators and receptor-coated partially-porous silicon resonators, respectively, as compared to nonporous silicon resonators.
UR - https://www.scopus.com/pages/publications/80155167719
U2 - 10.1109/FCS.2011.5977841
DO - 10.1109/FCS.2011.5977841
M3 - Conference contribution
AN - SCOPUS:80155167719
SN - 9781612841106
T3 - Proceedings of the IEEE International Frequency Control Symposium and Exposition
BT - 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2011 - Proceedings
T2 - 5th Joint Conference of the 65th IEEE International Frequency Control Symposium, IFCS 2011 and 25th European Frequency and Time Forum, EFTF 2011
Y2 - 1 May 2011 through 5 May 2011
ER -