Reduction of dislocation density in mismatched SiGe/Si using a low-temperature Si buffer layer

  • K. K. Linder*
  • , F. C. Zhang
  • , J. S. Rieh
  • , P. Bhattacharya
  • , D. Houghton
  • *Corresponding author for this work

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113 Citations (Scopus)

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Material Science

Physics