Reduction of residual carbon in GaAsN films grown by chemical beam epitaxy

  • Hidetoshi Suzuki*
  • , Kenichi Nishimura
  • , Hae Seok Lee
  • , Kenji Saito
  • , Tetsuya Kawahigashi
  • , Takahiro Imai
  • , Yoshio Ohshita
  • , Masafumi Yamaguchi
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Keyphrases

Chemical Engineering

Material Science