Abstract
The BZN pyrochlore thin films were prepared on platinized Si substrates using a reactive RF magnetron sputtering. The structures, surface morphologies, dielectric properties and voltage tunable properties of films with deposition parameters were investigated. The BZN thin films have a cubic pyrochlore phase and secondary phases of zinc niobate, bismuth niobate when crystallized at 600 °C ∼ 800 °C. The dielectric constant and tunability of thin films are O2/Ar ratio and post-annealing temperature dependent. The BZN thin films sputtered in 15% O2 and annealed at 700 °C had a dielectric constant of 153, tan δ of ∼0.003 and maximum tunability of 14% at 1,000kV/cm.
Original language | English |
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Pages (from-to) | 73-78 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 720 |
DOIs | |
Publication status | Published - 2002 |
Externally published | Yes |
Event | Materials Issues for Tunable RF and Microwave Devices III - San Francisco, CA, United States Duration: 2002 Apr 2 → 2002 Apr 3 |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering