RF sputtered BZN pyrochlore thin films for voltage tunable dielectric device applications

Young Pyo Hong, Seok Ha, Ha Yong Lee, Young Cheol Lee, Kyung Hyun Ko, Dong Wan Kim, Hee Bum Hong, Kug Sun Hong

Research output: Contribution to journalConference articlepeer-review


The BZN pyrochlore thin films were prepared on platinized Si substrates using a reactive RF magnetron sputtering. The structures, surface morphologies, dielectric properties and voltage tunable properties of films with deposition parameters were investigated. The BZN thin films have a cubic pyrochlore phase and secondary phases of zinc niobate, bismuth niobate when crystallized at 600 °C ∼ 800 °C. The dielectric constant and tunability of thin films are O2/Ar ratio and post-annealing temperature dependent. The BZN thin films sputtered in 15% O2 and annealed at 700 °C had a dielectric constant of 153, tan δ of ∼0.003 and maximum tunability of 14% at 1,000kV/cm.

Original languageEnglish
Pages (from-to)73-78
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 2002
Externally publishedYes
EventMaterials Issues for Tunable RF and Microwave Devices III - San Francisco, CA, United States
Duration: 2002 Apr 22002 Apr 3

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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