TY - GEN
T1 - Role of nitrogen and impurity on free carrier concentration in GaAsN grown by chemical beam epitaxy
AU - Imai, Takahiro
AU - Lee, Hae Seok
AU - Nishimura, Kenichi
AU - Suzuki, Hidetoshi
AU - Kawahigashi, Tetsuya
AU - Sasaki, Takuo
AU - Ohshita, Yoshio
AU - Yamaguchi, Masafumi
PY - 2006
Y1 - 2006
N2 - GaAsN thin films were grown by chemical beam epitaxy using monomethylhydrazine ((CH3)N2H3) as the N sources, and the role of the nitrogen (N) and impurities (hydrogen (H), carbon (C)) on free carrier concentration was investigated. The N, H, and C concentrations increased with decreasing growth temperature. GaAsN thin film grown at 470°C was n-type conduction, and the donor is thought to be the same in GaAs thin film. On the other hand, the films grown at 390-460°C were p-type conduction. In the range of 420-460°C, the hole concentration increased with decreasing growth temperature, and it decreased below 420°C, respectively. In order to clarify the origin of acceptor in p-GaAsN thin films, the dependence of growth temperature on the hole concentration and N, H, and C concentration were investigated, and the relationship between them was discussed.
AB - GaAsN thin films were grown by chemical beam epitaxy using monomethylhydrazine ((CH3)N2H3) as the N sources, and the role of the nitrogen (N) and impurities (hydrogen (H), carbon (C)) on free carrier concentration was investigated. The N, H, and C concentrations increased with decreasing growth temperature. GaAsN thin film grown at 470°C was n-type conduction, and the donor is thought to be the same in GaAs thin film. On the other hand, the films grown at 390-460°C were p-type conduction. In the range of 420-460°C, the hole concentration increased with decreasing growth temperature, and it decreased below 420°C, respectively. In order to clarify the origin of acceptor in p-GaAsN thin films, the dependence of growth temperature on the hole concentration and N, H, and C concentration were investigated, and the relationship between them was discussed.
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U2 - 10.1109/WCPEC.2006.279588
DO - 10.1109/WCPEC.2006.279588
M3 - Conference contribution
AN - SCOPUS:41749097214
SN - 1424400163
SN - 9781424400164
T3 - Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
SP - 842
EP - 844
BT - Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
PB - IEEE Computer Society
T2 - 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
Y2 - 7 May 2006 through 12 May 2006
ER -