Abstract
Metalenses are attractive alternatives to conventional bulky refractive lenses owing to their superior light-modulating performance and sub-micrometre-scale thicknesses; however, limitations in existing fabrication techniques, including high cost, low throughput and small patterning area, have hindered their mass production. Here we demonstrate low-cost and high-throughput mass production of large-aperture visible metalenses using deep-ultraviolet argon fluoride immersion lithography and wafer-scale nanoimprint lithography. Once a 12″ master stamp is imprinted, hundreds of centimetre-scale metalenses can be fabricated using a thinly coated high-index film to enhance light confinement, resulting in a substantial increase in conversion efficiency. As a proof of concept, an ultrathin virtual reality device created with the printed metalens demonstrates its potential towards the scalable manufacturing of metaphotonic devices.
Original language | English |
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Pages (from-to) | 474-481 |
Number of pages | 8 |
Journal | Nature Materials |
Volume | 22 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2023 Apr |
Bibliographical note
Funding Information:This work was financially supported by the POSCO-POSTECH-RIST Convergence Research Center programme funded by POSCO, the Samsung Research Funding & Incubation Center for Future Technology grant (SRFC-IT1901-52) funded by Samsung Electronics, and the National Research Foundation (NRF) grants (NRF-2022M3C1A3081312, NRF-2022M3H4A1A02074314, NRF-2022M3H4A1A02085335, NRF-2021M3H4A1A04086554, NRF-2021K2A9A2A15000174, NRF-2019R1A2C3003129, NRF-2019R1A5A8080290, CAMM-2019M3A6B3030637) funded by the Ministry of Science and ICT (MSIT) of the Korean government. H.L. acknowledges the NRF grant (NRF-2019K1A4A7A02113032) funded by the MSIT, and Technology Innovation Program (20016234) funded by the Ministry of Trade, Industry & Energy of the Korean government. J.K. and H.K. acknowledge the POSTECH Alchemist fellowships. D.K.O., Y.Y. and Y.K. acknowledge the Hyundai Motor Chung Mong-Koo fellowships. Y.Y. and Y.K. acknowledge the NRF PhD fellowships (NRF-2021R1A6A3A13038935 and NRF-2022R1A6A3A13066251, respectively) funded by the Ministry of Education of the Korean government. Y.K. acknowledges the NRF International Research & Development fellowship (NRF-2022K1A3A1A12080445) funded by the MSIT of the Korean government. The authors thank T. Badloe (POSTECH) for English proofreading and fruitful discussion.
Funding Information:
This work was financially supported by the POSCO-POSTECH-RIST Convergence Research Center programme funded by POSCO, the Samsung Research Funding & Incubation Center for Future Technology grant (SRFC-IT1901-52) funded by Samsung Electronics, and the National Research Foundation (NRF) grants (NRF-2022M3C1A3081312, NRF-2022M3H4A1A02074314, NRF-2022M3H4A1A02085335, NRF-2021M3H4A1A04086554, NRF-2021K2A9A2A15000174, NRF-2019R1A2C3003129, NRF-2019R1A5A8080290, CAMM-2019M3A6B3030637) funded by the Ministry of Science and ICT (MSIT) of the Korean government. H.L. acknowledges the NRF grant (NRF-2019K1A4A7A02113032) funded by the MSIT, and Technology Innovation Program (20016234) funded by the Ministry of Trade, Industry & Energy of the Korean government. J.K. and H.K. acknowledge the POSTECH Alchemist fellowships. D.K.O., Y.Y. and Y.K. acknowledge the Hyundai Motor Chung Mong-Koo fellowships. Y.Y. and Y.K. acknowledge the NRF PhD fellowships (NRF-2021R1A6A3A13038935 and NRF-2022R1A6A3A13066251, respectively) funded by the Ministry of Education of the Korean government. Y.K. acknowledges the NRF International Research & Development fellowship (NRF-2022K1A3A1A12080445) funded by the MSIT of the Korean government. The authors thank T. Badloe (POSTECH) for English proofreading and fruitful discussion.
Publisher Copyright:
© 2023, The Author(s), under exclusive licence to Springer Nature Limited.
ASJC Scopus subject areas
- General Chemistry
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering