Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible

Joohoon Kim, Junhwa Seong, Wonjoong Kim, Gun Yeal Lee, Seokwoo Kim, Hongyoon Kim, Seong Won Moon, Dong Kyo Oh, Younghwan Yang, Jeonghoon Park, Jaehyuck Jang, Yeseul Kim, Minsu Jeong, Chanwoong Park, Hojung Choi, Gyoseon Jeon, Kyung il Lee, Dong Hyun Yoon, Namkyoo Park, Byoungho LeeHeon Lee, Junsuk Rho

Research output: Contribution to journalArticlepeer-review

73 Citations (Scopus)

Abstract

Metalenses are attractive alternatives to conventional bulky refractive lenses owing to their superior light-modulating performance and sub-micrometre-scale thicknesses; however, limitations in existing fabrication techniques, including high cost, low throughput and small patterning area, have hindered their mass production. Here we demonstrate low-cost and high-throughput mass production of large-aperture visible metalenses using deep-ultraviolet argon fluoride immersion lithography and wafer-scale nanoimprint lithography. Once a 12″ master stamp is imprinted, hundreds of centimetre-scale metalenses can be fabricated using a thinly coated high-index film to enhance light confinement, resulting in a substantial increase in conversion efficiency. As a proof of concept, an ultrathin virtual reality device created with the printed metalens demonstrates its potential towards the scalable manufacturing of metaphotonic devices.

Original languageEnglish
Pages (from-to)474-481
Number of pages8
JournalNature Materials
Volume22
Issue number4
DOIs
Publication statusPublished - 2023 Apr

Bibliographical note

Funding Information:
This work was financially supported by the POSCO-POSTECH-RIST Convergence Research Center programme funded by POSCO, the Samsung Research Funding & Incubation Center for Future Technology grant (SRFC-IT1901-52) funded by Samsung Electronics, and the National Research Foundation (NRF) grants (NRF-2022M3C1A3081312, NRF-2022M3H4A1A02074314, NRF-2022M3H4A1A02085335, NRF-2021M3H4A1A04086554, NRF-2021K2A9A2A15000174, NRF-2019R1A2C3003129, NRF-2019R1A5A8080290, CAMM-2019M3A6B3030637) funded by the Ministry of Science and ICT (MSIT) of the Korean government. H.L. acknowledges the NRF grant (NRF-2019K1A4A7A02113032) funded by the MSIT, and Technology Innovation Program (20016234) funded by the Ministry of Trade, Industry & Energy of the Korean government. J.K. and H.K. acknowledge the POSTECH Alchemist fellowships. D.K.O., Y.Y. and Y.K. acknowledge the Hyundai Motor Chung Mong-Koo fellowships. Y.Y. and Y.K. acknowledge the NRF PhD fellowships (NRF-2021R1A6A3A13038935 and NRF-2022R1A6A3A13066251, respectively) funded by the Ministry of Education of the Korean government. Y.K. acknowledges the NRF International Research & Development fellowship (NRF-2022K1A3A1A12080445) funded by the MSIT of the Korean government. The authors thank T. Badloe (POSTECH) for English proofreading and fruitful discussion.

Funding Information:
This work was financially supported by the POSCO-POSTECH-RIST Convergence Research Center programme funded by POSCO, the Samsung Research Funding & Incubation Center for Future Technology grant (SRFC-IT1901-52) funded by Samsung Electronics, and the National Research Foundation (NRF) grants (NRF-2022M3C1A3081312, NRF-2022M3H4A1A02074314, NRF-2022M3H4A1A02085335, NRF-2021M3H4A1A04086554, NRF-2021K2A9A2A15000174, NRF-2019R1A2C3003129, NRF-2019R1A5A8080290, CAMM-2019M3A6B3030637) funded by the Ministry of Science and ICT (MSIT) of the Korean government. H.L. acknowledges the NRF grant (NRF-2019K1A4A7A02113032) funded by the MSIT, and Technology Innovation Program (20016234) funded by the Ministry of Trade, Industry & Energy of the Korean government. J.K. and H.K. acknowledge the POSTECH Alchemist fellowships. D.K.O., Y.Y. and Y.K. acknowledge the Hyundai Motor Chung Mong-Koo fellowships. Y.Y. and Y.K. acknowledge the NRF PhD fellowships (NRF-2021R1A6A3A13038935 and NRF-2022R1A6A3A13066251, respectively) funded by the Ministry of Education of the Korean government. Y.K. acknowledges the NRF International Research & Development fellowship (NRF-2022K1A3A1A12080445) funded by the MSIT of the Korean government. The authors thank T. Badloe (POSTECH) for English proofreading and fruitful discussion.

Publisher Copyright:
© 2023, The Author(s), under exclusive licence to Springer Nature Limited.

ASJC Scopus subject areas

  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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