Abstract
This paper reports the development of a new technique for nanometer-scale thermal imaging and thermal property measurement - scanning thermal wave microscope (STWM). By raster scanning a sharp temperature-sensing probe the STWM measures the distribution of the phase lag and the amplitude of a thermal wave on the sample surface at a certain distance away from the heat source. As a benchmark experiment for this technique, the phase lag distribution of a thermal wave generated by a line heat source on a Pyrex glass sample was measured and compared with analytical solution. The effect of liquid film at the tip-sample contact on the measured phase lag was also studied. The ability of STWM to locate sub-surface heat source in a ULSI circuit was experimentally demonstrated.
Original language | English |
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Title of host publication | Heat Transfer |
Subtitle of host publication | Volume 2 |
Publisher | American Society of Mechanical Engineers (ASME) |
Pages | 385-391 |
Number of pages | 7 |
ISBN (Electronic) | 9780791826607 |
DOIs | |
Publication status | Published - 2000 |
Externally published | Yes |
Event | ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States Duration: 2000 Nov 5 → 2000 Nov 10 |
Publication series
Name | ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) |
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Volume | 2000-T |
Conference
Conference | ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000 |
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Country/Territory | United States |
City | Orlando |
Period | 00/11/5 → 00/11/10 |
Bibliographical note
Publisher Copyright:© 2000 by ASME.
ASJC Scopus subject areas
- Mechanical Engineering