Scanning thermal wave microscopy

O. Kwon, L. Shi, A. Miner, A. Majumdar

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper reports the development of a new technique for nanometer-scale thermal imaging and thermal property measurement - scanning thermal wave microscope (STWM). By raster scanning a sharp temperature-sensing probe the STWM measures the distribution of the phase lag and the amplitude of a thermal wave on the sample surface at a certain distance away from the heat source. As a benchmark experiment for this technique, the phase lag distribution of a thermal wave generated by a line heat source on a Pyrex glass sample was measured and compared with analytical solution. The effect of liquid film at the tip-sample contact on the measured phase lag was also studied. The ability of STWM to locate sub-surface heat source in a ULSI circuit was experimentally demonstrated.

Original languageEnglish
Title of host publicationHeat Transfer
Subtitle of host publicationVolume 2
PublisherAmerican Society of Mechanical Engineers (ASME)
Number of pages7
ISBN (Electronic)9780791826607
Publication statusPublished - 2000
Externally publishedYes
EventASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States
Duration: 2000 Nov 52000 Nov 10

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)


ConferenceASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000
Country/TerritoryUnited States

Bibliographical note

Publisher Copyright:
© 2000 by ASME.

ASJC Scopus subject areas

  • Mechanical Engineering


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