Selective placement of single-walled carbon nanotubes on pre-defined micro-patterns on SiO2 surface based on a dry lift-off technique

Thu Hong Tran, Kyong Soo Lee, Jin Woo Lee, Byeong Kwon Ju

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

We reported a new technique for self-assembly of selective placement of carbon nanotubes (CNT) on pre- defined micro-patterns. Our work based on the use of a poly-para-xylylene C passivation layer on silicon dioxide (SiO2) surface which was micro-patterned by reactive ion etching (RIE) process and follow by the CNT deposition step. The lift-off of poly-para-xylylene layer then was carried out relying on a dry lift-off method in order to remove the nanotubes adsorbed on the poly-para-xylylene layer leaving the CNT on the desirable areas. CNT located at specific micro-areas with pre-defined patterns from 50 μm down to less than 10 μm line width and variable shapes. This approach provides a simple and useful means allow controlled placement of CNT which is necessary for the large-scale fabrication of electronic devices.

Original languageEnglish
Pages (from-to)S38-S42
JournalCurrent Applied Physics
Volume9
Issue number1 SUPPL.
DOIs
Publication statusPublished - 2009 Jan

Bibliographical note

Funding Information:
This work was supported by the National Research Laboratory NRL, (R0A-2007-000-20111-0) Program of the Ministry of Science and Technology in Korea Science and partially supported by the IT R&D program of MKE/IITA [2006-S-078-03, Environmental Sensing and Alerting System with Nano-wire and Nano-tube], We thank government for financial supports.

Keywords

  • Deposition
  • Dry lift-off removal
  • Micro-scale patterns
  • Nanomaterial
  • Poly-para-xylylene C

ASJC Scopus subject areas

  • General Materials Science
  • General Physics and Astronomy

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