Selective placement of single-walled carbon nanotubes on pre-defined micro-patterns on SiO2 surface based on a dry lift-off technique

Thu Hong Tran; Kyong Soo Lee; Jin Woo Lee; Byeong Kwon Ju

doi:10.1016/j.cap.2008.08.047

Selective placement of single-walled carbon nanotubes on pre-defined micro-patterns on SiO₂ surface based on a dry lift-off technique

Thu Hong Tran, Kyong Soo Lee, Jin Woo Lee, Byeong Kwon Ju

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We reported a new technique for self-assembly of selective placement of carbon nanotubes (CNT) on pre- defined micro-patterns. Our work based on the use of a poly-para-xylylene C passivation layer on silicon dioxide (SiO₂) surface which was micro-patterned by reactive ion etching (RIE) process and follow by the CNT deposition step. The lift-off of poly-para-xylylene layer then was carried out relying on a dry lift-off method in order to remove the nanotubes adsorbed on the poly-para-xylylene layer leaving the CNT on the desirable areas. CNT located at specific micro-areas with pre-defined patterns from 50 μm down to less than 10 μm line width and variable shapes. This approach provides a simple and useful means allow controlled placement of CNT which is necessary for the large-scale fabrication of electronic devices.

Original language	English
Pages (from-to)	S38-S42
Journal	Current Applied Physics
Volume	9
Issue number	1 SUPPL.
DOIs	https://doi.org/10.1016/j.cap.2008.08.047
Publication status	Published - 2009 Jan

Bibliographical note

Funding Information:
This work was supported by the National Research Laboratory NRL, (R0A-2007-000-20111-0) Program of the Ministry of Science and Technology in Korea Science and partially supported by the IT R&D program of MKE/IITA [2006-S-078-03, Environmental Sensing and Alerting System with Nano-wire and Nano-tube], We thank government for financial supports.

Keywords

Deposition
Dry lift-off removal
Micro-scale patterns
Nanomaterial
Poly-para-xylylene C

ASJC Scopus subject areas

General Materials Science
General Physics and Astronomy

Access to Document

10.1016/j.cap.2008.08.047

Cite this

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title = "Selective placement of single-walled carbon nanotubes on pre-defined micro-patterns on SiO2 surface based on a dry lift-off technique",

abstract = "We reported a new technique for self-assembly of selective placement of carbon nanotubes (CNT) on pre- defined micro-patterns. Our work based on the use of a poly-para-xylylene C passivation layer on silicon dioxide (SiO2) surface which was micro-patterned by reactive ion etching (RIE) process and follow by the CNT deposition step. The lift-off of poly-para-xylylene layer then was carried out relying on a dry lift-off method in order to remove the nanotubes adsorbed on the poly-para-xylylene layer leaving the CNT on the desirable areas. CNT located at specific micro-areas with pre-defined patterns from 50 μm down to less than 10 μm line width and variable shapes. This approach provides a simple and useful means allow controlled placement of CNT which is necessary for the large-scale fabrication of electronic devices.",

keywords = "Deposition, Dry lift-off removal, Micro-scale patterns, Nanomaterial, Poly-para-xylylene C",

author = "Tran, {Thu Hong} and Lee, {Kyong Soo} and Lee, {Jin Woo} and Ju, {Byeong Kwon}",

note = "Funding Information: This work was supported by the National Research Laboratory NRL, (R0A-2007-000-20111-0) Program of the Ministry of Science and Technology in Korea Science and partially supported by the IT R&D program of MKE/IITA [2006-S-078-03, Environmental Sensing and Alerting System with Nano-wire and Nano-tube], We thank government for financial supports.",

year = "2009",

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doi = "10.1016/j.cap.2008.08.047",

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AU - Lee, Kyong Soo

AU - Lee, Jin Woo

AU - Ju, Byeong Kwon

N1 - Funding Information: This work was supported by the National Research Laboratory NRL, (R0A-2007-000-20111-0) Program of the Ministry of Science and Technology in Korea Science and partially supported by the IT R&D program of MKE/IITA [2006-S-078-03, Environmental Sensing and Alerting System with Nano-wire and Nano-tube], We thank government for financial supports.

PY - 2009/1

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N2 - We reported a new technique for self-assembly of selective placement of carbon nanotubes (CNT) on pre- defined micro-patterns. Our work based on the use of a poly-para-xylylene C passivation layer on silicon dioxide (SiO2) surface which was micro-patterned by reactive ion etching (RIE) process and follow by the CNT deposition step. The lift-off of poly-para-xylylene layer then was carried out relying on a dry lift-off method in order to remove the nanotubes adsorbed on the poly-para-xylylene layer leaving the CNT on the desirable areas. CNT located at specific micro-areas with pre-defined patterns from 50 μm down to less than 10 μm line width and variable shapes. This approach provides a simple and useful means allow controlled placement of CNT which is necessary for the large-scale fabrication of electronic devices.

AB - We reported a new technique for self-assembly of selective placement of carbon nanotubes (CNT) on pre- defined micro-patterns. Our work based on the use of a poly-para-xylylene C passivation layer on silicon dioxide (SiO2) surface which was micro-patterned by reactive ion etching (RIE) process and follow by the CNT deposition step. The lift-off of poly-para-xylylene layer then was carried out relying on a dry lift-off method in order to remove the nanotubes adsorbed on the poly-para-xylylene layer leaving the CNT on the desirable areas. CNT located at specific micro-areas with pre-defined patterns from 50 μm down to less than 10 μm line width and variable shapes. This approach provides a simple and useful means allow controlled placement of CNT which is necessary for the large-scale fabrication of electronic devices.

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